Abstract:An advanced electronic phase stepped interferometry (EPSI) system is described for quantitative out-of-plane displacement and surface topography measurements for NDE applications. Image processing algorithms were developed using novel techniques to extend the sensitivity of EPSI and provide near real-time measurement capability. EPSI is known to provide out-ofplane displacement and surface topography measurements on the order of 1/20-1/100 microns. Noise can be a limiting factor, however, and robust phase unwr… Show more
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