<title>Automated high-accuracy measuring system for specular microreflectivity</title>

Abstract

An automated, compact system for high-accuracy measurements of specular reflectivity at different laser wavelengths (633 nm, 822 nm) on the basis of lock-in technique and LabView has been developed. With a spatial resolution of < 2 µm, a signal resolution of < 10 -4 was obtained. Micro-optical components like microlenses with angular-compensating antireflection coatings, non-uniform micro-mirror arrays, broad-stripe diode laser facets and low-numerical-aperture gradedindex microlenses have been characterized by two-dimensional reflectivity mapping. Errors caused by the angular spectrum of the focused polarized probe lasers were analysed.