“…Today, there are several techniques of forming a diffraction grating on the semiconductor substrate, namely, the laser-induced periodic surface structures [4], extreme ultraviolet lithography [5], electron beam lithography [6], ion beam lithography [7], nanoimprint technology [8], pulsed laser interference lithography [9], and laser interference lithography [10, 11]. The latter is well known and relatively cheap method that allows to form a planar periodicity on large areas.…”