1998
DOI: 10.1117/12.323767
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<title>Chalcogenide inorganic resists as holographic recording media</title>

Abstract: In present paper the utilization of the two types of inorganic resists: Ag-chalcogenide glass (ChG) structures and thin ChG layers for holograms recording is discussed. The optical characteristics and photographic properties of this materials were investigated, the study of hologram relief formation in ChGAg and ChG layers have been made. Among the investigated ChG layers the As40S20Se40 have shown the most optimal characteristics for the hologram recording. Good mechanical strength and thermostability of ChG … Show more

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Cited by 8 publications
(4 citation statements)
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“…The quasi-anticorrelated interfaces of plasmon-carrying film on the flat semiconductor substrate forming Schottky barrier were produced by laser interference lithography method [11] with the following technological stages: (i) layer-by-layer vacuum deposition of a thin metal film (Au) and a vitreous chalcogenide photoresist (As 40 S 30 Se 30 ) film on a flat semiconductor substrate (GaAs); (ii) the exposure of this pattern by the interference field of two beams of He-Ne ( λ =488 nm) lasers with period 200–800 nm; (iii) the subsequent chemical etching to form the 1D periodic array of chalcogenide wires on the surface of a flat Au film; (iv) the chemical removing (by the solution based on composition KJ) of open metal areas through the previously obtained mask; and finally, (v) the vacuum deposition of the top metal film.…”
Section: Methodsmentioning
confidence: 99%
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“…The quasi-anticorrelated interfaces of plasmon-carrying film on the flat semiconductor substrate forming Schottky barrier were produced by laser interference lithography method [11] with the following technological stages: (i) layer-by-layer vacuum deposition of a thin metal film (Au) and a vitreous chalcogenide photoresist (As 40 S 30 Se 30 ) film on a flat semiconductor substrate (GaAs); (ii) the exposure of this pattern by the interference field of two beams of He-Ne ( λ =488 nm) lasers with period 200–800 nm; (iii) the subsequent chemical etching to form the 1D periodic array of chalcogenide wires on the surface of a flat Au film; (iv) the chemical removing (by the solution based on composition KJ) of open metal areas through the previously obtained mask; and finally, (v) the vacuum deposition of the top metal film.…”
Section: Methodsmentioning
confidence: 99%
“…Today, there are several techniques of forming a diffraction grating on the semiconductor substrate, namely, the laser-induced periodic surface structures [4], extreme ultraviolet lithography [5], electron beam lithography [6], ion beam lithography [7], nanoimprint technology [8], pulsed laser interference lithography [9], and laser interference lithography [10, 11]. The latter is well known and relatively cheap method that allows to form a planar periodicity on large areas.…”
Section: Introductionmentioning
confidence: 99%
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“…Äèôðàêö³éí³ ´ðàòêè íà ïîâåðõí³ GaAs (100) áóëè îòðèìàí³ ìåòîäîì ãîëîãðàô³÷íî¿ ôîòîë³-òîãðàô³¿ [2]. Íà ¿õ îñíîâ³ áàãàòîøàðîâ³ ñòðóê-òóðè âèãîòîâëÿëèñü øëÿõîì ïîåòàïíîãî òåð-ì³÷íîãî îñàäaeåííÿ òîíêèõ ìåòàëåâèõ (Au, Ag) òà ä³åëåêòðè÷íèõ (SiO x ) ïë³âîê, à òàêîae ñïîñî-áîì ìàãíåòðîííîãî ðîçïèëåííÿ ïë³âîê ²ÒÎ íà òåêñòóðîâàí³ (ÄÃ) ïîâåðõí³ (GaAs) ³ íà ïëîñê³ çðàçêè-ñóïóòíèêè ïðè ê³ìíàòí³é òåìïåðàòóð³ â îäí³é ñòà䳿 íàïèëåííÿ.…”
Section: çðàçêè òà ìåòîäèunclassified