&lt;title&gt;Comparison of low-scatter-mirror PSD derived from multiple-wavelength BRDFs and WYKO profilometer data&lt;/title&gt;

Wong, Wallace K.; Wang, Dexter; Benoit, Robert; Barthol, P.

doi:10.1117/12.50499

SPIE Proceedings

1991

DOI: 10.1117/12.50499

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<title>Comparison of low-scatter-mirror PSD derived from multiple-wavelength BRDFs and WYKO profilometer data</title>

Wallace K. Wong¹,

Dexter Wang²,

Robert Benoit³

et al.

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Grazing-incidence small-angle X-ray scattering in a twofold rough-interface medium: a new theoretical approach using theq-eigenwave formalism

Chukhovskii

Рощин

2015

Acta Cryst Sect A

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Based on the rigorous Green function formalism to describe the grazing-incidence small-angle X-ray scattering (GISAXS) problem, a system of two linked integral equations is derived with respect to amplitudes of the reflected and transmitted plane q-eigenwaves (eigenstate functions) propagating through two homogeneous media separated from each other by a rough surface interface. To build up the coupled solutions of these basic equations beyond the perturbation theory constraint 2kσθ0 < 1, a simple iteration procedure is proposed as opposed to the self-consistent wave approach [Chukhovskii (2011). Acta Cryst. A67, 200-209; Chukhovski (2012). Acta Cryst. A68, 505-512]. Using the first-order iteration, analytical expressions for the averaged specular and non-specular scattering intensity distributions have been obtained. These expressions are further analysed in terms of the GISAXS parameters {k, θ, θ0} and surface finish ones {σ, l, h}, where θ and θ0 are the scattering and incidence angles of the X-rays, respectively, σ is the root-mean-square roughness, l is the correlation length, h is the fractal surface model index, k = 2π/λ, and λ is the X-ray wavelength. A direct way to determine the surface finish parameters from the experimental specular and diffuse scattering indicatrix scan data is discussed for an example of GISAXS measurements from rough surfaces of α-quartz and CdTe samples.

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Grazing-incidence small-angle X-ray scattering in a twofold rough-interface medium: a new theoretical approach using theq-eigenwave formalism

Chukhovskii

Рощин

2015

Acta Cryst Sect A

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Power spectral densities: A multiple technique study of different Si wafer surfaces

Marx

Malik

Strausser

et al. 2002

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epitaxial wafers. The wafer surfaces were then measured with different methods: atomic force microscopy, angle-resolved light scatter, interferometric microscopy, optical profiling, stylus profiling, and capacitance-based wafer thickness gaging. The data were used to compute one-dimensional PSDs and the curves were plotted as functions of spatial frequencies, comparing results for different samples or for different instruments. The useful frequency range for each method is indicated and differences in the calculated PSD values in the overlapping region of two or more methods are discussed. The method used to convert two-dimensional PSDs to one-dimensional ones is presented.

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<title>Comparison of low-scatter-mirror PSD derived from multiple-wavelength BRDFs and WYKO profilometer data</title>

Cited by 2 publications

References 0 publications

Grazing-incidence small-angle X-ray scattering in a twofold rough-interface medium: a new theoretical approach using theq-eigenwave formalism

Grazing-incidence small-angle X-ray scattering in a twofold rough-interface medium: a new theoretical approach using theq-eigenwave formalism

Power spectral densities: A multiple technique study of different Si wafer surfaces

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