&lt;title&gt;Current status of measurement standards for vibration and shock in NRLM&lt;/title&gt;

Ueda, Kazunaga; Usuda, Takashi; Kurosawa, Tomizo

doi:10.1117/12.386720

Cited by 4 publications

(1 citation statement)

References 4 publications

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“…Rui-Jun Li 1 , Ying-Jun Lei 1 , Lian-Sheng Zhang 1,3 , Zhen-Xin Chang 1 , Kuang-Chao Fan 1,2 , Zhen-Ying Cheng 1 and Peng-Hao Hu 1 10 kHz [5,6], they also developed a laser interferometer for calibration of vibration [7]. However, the lateral vibration generator can only produce horizontal vibration and accelerometers based on the inertia principle cannot be calibrated.…”

Section: High-precision and Low-cost Vibration Generator For Low-freq...mentioning

confidence: 99%

High-precision and low-cost vibration generator for low-frequency calibration system

Lei

Zhang

et al. 2018

Meas. Sci. Technol.

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Low-frequency vibration is one of the harmful factors that affect the accuracy of micro-/nano-measuring machines because its amplitude is significantly small and it is very difficult to avoid. In this paper, a low-cost and high-precision vibration generator was developed to calibrate an optical accelerometer, which is self-designed to detect low-frequency vibration. A piezoelectric actuator is used as vibration exciter, a leaf spring made of beryllium copper is used as an elastic component, and a high-resolution, low-thermal-drift eddy current sensor is applied to investigate the vibrator’s performance. Experimental results demonstrate that the vibration generator can achieve steady output displacement with frequency range from 0.6 Hz to 50 Hz, an analytical displacement resolution of 3.1 nm and an acceleration range from 3.72 mm s−2 to 1935.41 mm s−2 with a relative standard deviation less than 1.79%. The effectiveness of the high-precision and low-cost vibration generator was verified by calibrating our optical accelerometer.

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Section: High-precision and Low-cost Vibration Generator For Low-freq...mentioning

confidence: 99%

High-precision and low-cost vibration generator for low-frequency calibration system

Lei

Zhang

et al. 2018

Meas. Sci. Technol.

View full text Add to dashboard Cite

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Invited Article: Expanded and improved traceability of vibration measurements by laser interferometry

Martens

2013

Review of Scientific Instruments

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Traceability to the International System of Units has been established for vibration and shock measurements as specified in international document standards, recommendations, and regulations to ensure product quality, health, and safety. New and upgraded laser methods and techniques developed by national metrology institutes and by leading manufacturers in the past two decades have been swiftly specified as standard methods in the ISO 16063 series of international document standards. In ISO 16063-11:1999, three interferometric methods are specified for the primary calibration of vibration transducers (reference standard accelerometers) in a frequency range from 1 Hz to 10 kHz. In order to specify the same (modified) methods for the calibration of laser vibrometers (ISO 16063-41:2011), their applicability in an expanded frequency range was investigated. Steady-state sinusoidal vibrations were generated by piezoelectric actuators at specific frequencies up to 347 kHz (acceleration amplitudes up to 376 km/s(2)). The displacement amplitude, adjusted by the special interferometric method of coincidence to 158.2 nm (quarter the wavelength of the He-Ne laser light), was measured by the standardized interferometric methods of fringe counting and sine-approximation. The deviations between the measurement results of the three interferometric methods applied simultaneously were smaller than 1%. The limits of measurement uncertainty specified in ISO 16063-11 between 1 Hz to 10 kHz were kept up to frequencies, which are orders of magnitude greater; the uncertainty limit 0.5% specified at the reference frequency 160 Hz was not exceeded at 160 kHz. The reported results were considered during the development of ISO 16063-41 by specifying the instrumentation and procedures for performing calibrations of rectilinear laser vibrometers in the frequency range typically between 0.4 Hz and 50 kHz--the interferometric methods may be applied within expanded frequency ranges using refined techniques and procedures. It is concluded that calibration frequencies up to 0.5 MHz are attainable in compliance with the first international document standard for the calibration of laser vibrometers.

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Development of Primary Calibration System for Vibration and Acceleration Standard in High Frequency Range with Laser Interferometer with Multifold Optical Path

et al. 2006

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<title>Current status of measurement standards for vibration and shock in NRLM</title>

Cited by 4 publications

References 4 publications

High-precision and low-cost vibration generator for low-frequency calibration system

High-precision and low-cost vibration generator for low-frequency calibration system

Invited Article: Expanded and improved traceability of vibration measurements by laser interferometry

Development of Primary Calibration System for Vibration and Acceleration Standard in High Frequency Range with Laser Interferometer with Multifold Optical Path

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