&lt;title&gt;Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process&lt;/title&gt;

Michalicek, M. Adrian; Comtois, John H.; Schriner, Heather K.

doi:10.1117/12.302408

Cited by 11 publications

(12 citation statements)

References 5 publications

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“…In recent years a number ofresearch groups have investigated the use ofMEM DM's for adaptive optics applications [1][2][3][4][5]. MEM DM's have the potential of covering the largest AO application space.…”

Section: Discussionmentioning

confidence: 99%

<title>Micro-electro-mechanical deformable mirrors for advanced adaptive optics applications</title>

et al. 1999

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Adaptive optics technology is critical for many current and developing applications at Lawrence Livermore National Laboratory. In particular, most large laser systems, including those being developed for Inertial Confinement Fusion and Laser Isotope Separation, require adaptive optics to correct for internal aberrations in these high-power systems. In addition, adaptive optics can provide capability for both high-resolution imaging and beam propagation through the atmosphere. Requirements for laser systems, imaging and propagation applications are currently driving wavefront control technology toward increased spatial and temporal frequency capacity, as well as reduced system costs. We will present recent progress in the development of micro-electro-mechanical deformable mirrors for adaptive optics applications. SummaryThree classes ofwavefront control devices can be considered for adaptive optics (AO) applications: standard deformable mirror (DM) technology utilizing ceramic (e.g, piezo-electric) actuators, liquid crystal (LC) spatial light modulators (SLM's), and micro-electro-mechanical (MEM) DM's. Some disadvantages of standard DM technology are limitations on the number of controllable degrees of freedom, large separation between active elements, significant power requirements, weight, and expense. The large physical size of conventional DM' s also leads to large optical components, making the entire AO system more cumbersome and costly. LC SLM's have the advantage of providing capability for high spatial frequency control applications. However, commercially available LC SLM's have the disadvantage of slow operating speeds, limited stroke, and low damage thresholds in comparison to conventional DM's.

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Section: Discussionmentioning

confidence: 99%

<title>Micro-electro-mechanical deformable mirrors for advanced adaptive optics applications</title>

et al. 1999

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“…MEM technology can provide devices with very low weight making them entirely suitable for ground based, airborne, and even hand-held wavefront correction applications. Figure 2 shows the details of an individual mirror design of a micro-mirror device developed at the Air force Research Laboratory (4)(5). This figure captures all of the advantages of the SUMMIT process for MOEMS.…”

Section: I0az Dnmentioning

confidence: 98%

“…This approximation is quite good if the cone of emerging rays is narrow enough. Thus, based upon this the approximation of a parabolic equation yields the transport equation v±I.v±w+Ivw+i= 0 dz (1) where V1 + is the gradient operator in the (x,y) plane which is normal to the direction of ax ay beam propagation [1][2][3][4][5].…”

Section: Wavefront Sensorsmentioning

confidence: 99%

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<title>Intelligent vision systems using dynamic neural networks</title>

Clark

Furth

1999

SPIE Proceedings

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The design of a silicon eye using dynamical neural networks. Our silicon eye is capable of not only able to compensate for defocus, but it can also compensate for other aberrations including astigmatism, coma, and spherical aberrations. In addition, the silicon retina acts as a reconfigurable dynamic neural network to enable real-time image processing. The silicon eye uses three key enabling technologies. First, high-speed active pixel photo-diodes are uses as photo-detectors for both imaging and for wavefront sensing. The design of the active pixel photo-detectors is described along with experimental results characterizing their performance. Second, the analog signals received from the photo-detectors and processed by the active pixel circuitry is fed into a smart vision chip. The smart vision chip is a reconfigurable neural network capable of real-time reconstruction of the phase information associated with the imaging system. The micro mirrors are active optic devices that can be used to compensate for optical aberrations. Experimental results obtained from the circuit implementation of the dynamical neural networks are presented The experimental results obtained from our intelligent vision system demonstrate that dynamical neural networks offer advantages in speed, cost, size, and power consumption.

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“…Micromirror arrays can be utilized in a variety of applications ranging from optical switching to beam-front correction in a variety of technologies [1,2]. This particular work is concerned with silicon surface micromachining (SMM).…”

Section: Introductionmentioning

confidence: 99%

<title>Pivoting micromirror designs for large orientation angles</title>

Garcia

2000

SPIE Proceedings

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This paper describes mechanical design concepts for a class of pivoting micromirrors that permit relatively large angles of orientation to be obtained when configured in large arrays. Micromirror arrays can be utilized in a variety of applications ranging from optical switching to beam-front correction in a variety of technologies [1,2]. This particular work is concerned with silicon surface micromachining (SMM). The multi-layer polysilicon surface micromachining process developed at Sandia National Laboratories is used to fabricate micromirror arrays that consist of capacitive electrode pairs which are used to electrostatically actuate mirrors to their desired positions and suitable elastic suspensions which support the 2 pm thick mirror structures. The designs described have been fabricated and successfully operated. Figure 1 illustrates a 100-~m x 100-ym micromirror actuated to 10°.

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<title>Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process</title>

Cited by 11 publications

References 5 publications

<title>Micro-electro-mechanical deformable mirrors for advanced adaptive optics applications</title>

<title>Micro-electro-mechanical deformable mirrors for advanced adaptive optics applications</title>

<title>Intelligent vision systems using dynamic neural networks</title>

<title>Pivoting micromirror designs for large orientation angles</title>

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