2003
DOI: 10.1117/12.515824
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<title>Electronic materials via laser radiation</title>

Abstract: The field of laser treatment on semiconductor materials is still displaying new important developments. Driven by the application to flat panel displays, excimer laser sources are being widely employed for the crystallization of silicon thin films. They are integrated with mass-production equipments and with techniques that control the location and onentation of the micrograins, and this method allows to obtain thin film large-grain polycrystalline silicon whose carrier mobility is approaching silicon-on-insul… Show more

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