&lt;title&gt;Feasibility of scatterometers with new geometrical concepts&lt;/title&gt;

Adrian, V.; Faure, Andre J.; Suinot, N.; Caille, G.; Barbas, M.; Raizonville, P.

doi:10.1117/12.227157

SPIE Proceedings

1995

DOI: 10.1117/12.227157

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<title>Feasibility of scatterometers with new geometrical concepts</title>

V. Adrian¹,

Andre J. Faure²,

N. Suinot³

et al.

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