&lt;title&gt;Highly reliable oxide VCSELs manufactured at HP/Agilent Technologies&lt;/title&gt;

Herrick, Robert W.; Lim, S.F.; Deng, Hongyu; Deng, Qiwen; Dudley, J.J.; Keever, M.; Oh, T.-H.; Li, Melissa Y.; Tashima, M. M.; Hodge, L. A.; Zhang, Xiaolong; Herniman, J.; Evans, Pete; Liang, Bing; Lei, Chun

doi:10.1117/12.384365

Cited by 3 publications

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“…Reducing the active volume reduces the junction temperature for a given current density, and reduces strain due to volume expansion of the active region caused by an elevated junction temperature. In oxide VCSELs this is quite different, since reducing the oxide aperture size increases the reliability problems associated with oxide aperture strain [2–4]. The 7.5 µm diameter oxide VCSEL not shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

“…The VCSEL reliability is limited by defect propagation, usually from the oxide aperture, and wear‐out. When the junction temperature is elevated relative to the thermal mount as a result of electrical biasing, internal strain fields are increased around the oxide aperture termination and lead to defect propagation from the aperture [2]. Exposure of the oxide VCSEL to moisture can dramatically accelerate this defect propagation [4].…”

Section: Introductionmentioning

confidence: 99%

“…This junction temperature influences many of the key laser diode parameters, including reliability, modulation speed and efficiency. Vertical-cavity surface-emitting lasers' (VCSEL) reliability, especially, has been shown to track junction temperature rise during operation over a wide range of operating conditions [1][2][3][4][5][6]. The VCSEL reliability is limited by defect propagation, usually from the oxide aperture, and wear-out.…”

mentioning

confidence: 99%

“…The 7.5 µm diameter oxide VCSEL not shown in Fig. 4 has a junction temperature of 185°C at the 50 kA/cm 2 current density shown to cause rapid failure [1][2][3][4][5][6]. Therefore very small lithographic VCSELs promise much higher reliability that can be achieved in oxide VCSELs today.…”

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Oxide‐free vertical‐cavity surface‐emitting lasers with low junction temperature and high drive level

Zhao

et al. 2014

Electron. lett.

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Data are presented showing that lithographic vertical-cavity surfaceemitting lasers (VCSELs) produce minimal junction temperature rise compared to oxide VCSELs. Eliminating the thermal block caused by internal oxides combined with improved mirror materials reduces the junction temperature. The elimination of internal oxide, lower junction temperature and reduced internal strain promise increased reliability in the new VCSELs. Power conversion efficiencies in excess of ∼50% are reported, even for very small lithographic VCSELs.Introduction: When a laser diode is electrically biased, its junction temperature rises above the temperature of its thermal mount. This junction temperature influences many of the key laser diode parameters, including reliability, modulation speed and efficiency. Vertical-cavity surface-emitting lasers' (VCSEL) reliability, especially, has been shown to track junction temperature rise during operation over a wide range of operating conditions [1][2][3][4][5][6]. The VCSEL reliability is limited by defect propagation, usually from the oxide aperture, and wear-out. When the junction temperature is elevated relative to the thermal mount as a result of electrical biasing, internal strain fields are increased around the oxide aperture termination and lead to defect propagation from the aperture [2]. Exposure of the oxide VCSEL to moisture can dramatically accelerate this defect propagation [4].In this Letter, we show that lithographic VCSELs not only eliminate the oxide reliability problems, but also will operate at a low junction temperature. The low junction temperature can extend wear-out lifetime and reduce the internal intrinsic device strain that results from electrical biasing. This combination appears to be capable of realising highly reliable VCSELs which are much more reliable than oxide VCSELs today. The data also indicate that smaller VCSELs can produce higher reliability than larger VCSELs. This is because smaller VCSELs can operate at lower junction temperatures at similar, or even higher, current densities.The data that is presented is measured for lithographic VCSELs, with varying sizes from a single wafer. The low junction temperature in the lithographic VCSELs results from eliminating the thermal barrier caused by the oxide, by incorporating high thermal conductivity AlAs as the low index mirror material in both the n-type and p-type mirror layers, and by using a high-efficiency design.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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confidence: 99%

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confidence: 99%

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Oxide‐free vertical‐cavity surface‐emitting lasers with low junction temperature and high drive level

Zhao

et al. 2014

Electron. lett.

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“…Agilent Technologies also has a laser design and manufacturing capability, employing hundreds of people, and makes most of its own VCSELs. Thus, our reliability capabilities were well established prior to starting the evaluation mentioned above [1,2] In this evaluation, we tested VCSELs from three different outside vendors. We have also examined detailed reliability reports from other suppliers under non-disclosure agreements.…”

Section: Introductionmentioning

confidence: 99%

Oxide VCSEL reliability qualification at Agilent Technologies

Herrick

2002

SPIE Proceedings

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In the past two years, Agilent Technologies has had a unique opportunity to study the reliability of VCSELs from most major manufacturers. We report on our methodology for qualifying prospective VCSEL suppliers, and briefly discuss our findings. The expected use environment for VCSELs is covered, along with VCSEL reliability limitations with existing technology. Differences between maverick and wearout failures are discussed, and examples of each are shown; VCSEL failure analysis is also briefly touched on. Finally, recent challenges in using oxide VCSELs in non-hermetic packaging, and 10 Gb/s operation, are briefly covered.

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