&lt;title&gt;Integrated force array: interface to external systems&lt;/title&gt;

Bobbio, Stephen M.; Smith, Stephen W.; Goodwin-Johansson, Scott H.; Fair, Richard B.; Dubois, Thomas; Tranjan, Farid M.; Hudak, John A.; Gupta, Rupali; Makki, Hussein

doi:10.1117/12.276614

Cited by 9 publications

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…IFAs have been described in previous publications [1][2][3][4]. These devices are patterned on 2.2 µm thick polyimide films using standard integrated circuit photolithography.…”

Section: The Integrated Force Array (Ifa)mentioning

confidence: 99%

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

et al. 2001

Self Cite

View full text Add to dashboard Cite

There is much interest in the biomedical community in mechanically steering both high frequency ultrasound transducers and various optical beams. We are currently investigating the use of two different types of MEMS actuators, integrated force arrays (IFAs) and spiral wound transducers (SWTs). The IFA is a linear actuator that is a parallel network of hundreds of thousands of flexible capacitors that electrostatically contract, and the SWT is a patterned tape that is wound to form a circular network of flexible capacitors that can be electrostatically compressed to tilt desired structures. Using ANSYS finite element analysis, we have developed tilting polyimide support structures, which are fabricated on silicon wafers. High frequency ultrasound transducers (20-30 MHz) have been built on these structures and IFAs used to tilt them to steer the ultrasound beam in fluids. Prototype structures have produced 20 degree sector scans scanning at frequencies up to 30 Hz. IFAs have also been used along with similar support structures to steer optical laser beams up to 45 degrees at frequencies up to 60 Hz. The SWT is a more recent development that operates with much greater force than the IFA that could steer ultrasound and optical beams for similar applications.

show abstract

“…IFAs have been described in previous publications [1][2][3][4]. These devices are patterned on 2.2 µm thick polyimide films using standard integrated circuit photolithography.…”

Section: The Integrated Force Array (Ifa)mentioning

confidence: 99%

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

et al. 2001

Self Cite

View full text Add to dashboard Cite

show abstract

“…The IFA has been discussed previously [6,7]. These devices are 3 mm wide and 1 cm long with active areas that are 3 mm by 8 nun and include more than 500,000 step in assembly was to attach the IFA actuator to the attachment flap on the table.…”

Section: (B) Contraction Of the Cells In The Arravmentioning

confidence: 99%

Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Zara

Izatt

Rao

et al.

Proceedings IEEE International Symposium on Biomedical Imaging

View full text Add to dashboard Cite

This paper describes the development of a new type of optical coherence tomography (OCT) probe using an electrostatic micromachine (MEMS) actuator. These devices consist of millimeter scale mirrors resting on micron scale polyimide hinges that are tilted using a linear MEMS actuator, the integrated force array (FA).The F A is a parallel network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated from polyimide on silicon wafers using photolithography. These scanners were designed, fabricated and tested for optical displacements at different frequencies and drive voltages. They were then used in the scanning arm of an experimental OCT imaging system to make preliminary images.

show abstract

“…This allows the use of many small capacitors to maximize the force per actuator area. These IFAs have been driven at frequencies up to 2 KHz and voltages up to f65 V[3]. For our imaging purposes, the IFAs were driven at voltages up to * 55 Volts at drive frequencies ranging from 10-60 Hz.…”

mentioning

confidence: 99%

Intracardiac ultrasound catheter using a micromachine (MEMS) actuator

Zara

Bobbio²,

Goodwin-Johansson³

et al.

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

View full text Add to dashboard Cite

Catheter based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this work is the development of catheter based, forward-looking mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The current transducer assembly consists of a single 20 MHz PZT piston mounted on a polyimide table that pivots on gold plated polyimide hinges. This table-mounted transducer is tilted using a linear MEMS actuator to produce a sector scan. The prototype transducedactuator assembly was fabricated and interfaced with a personal computer to create a single channel ultrasound scanner. This paper will discuss the development of and results obtained by this real time scanning system.

show abstract

<title>Integrated force array: interface to external systems</title>

Cited by 9 publications

References 0 publications

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

Synthetic muscle actuators: applications in ultrasonic imaging and optical beam steering

Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Intracardiac ultrasound catheter using a micromachine (MEMS) actuator

Contact Info

Product

Resources

About