&lt;title&gt;Ion beam and plasma jet etching for optical component fabrication&lt;/title&gt;

Schindler, Axel; Haensel, Thomas; Flamm, D.; Frank, W.; Boehm, Gerhard; Frost, Frank; Fechner, Renate; Bigl, F.; Rauschenbach, B.

doi:10.1117/12.448043

Cited by 38 publications

(16 citation statements)

References 8 publications

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“…Today, there are a number of concepts based on chemo-mechanical polishing with conventional polishing pads and slurries, magnetorheological finishing (MRF) 3 , ion beam figuring (IBF) 4 and traditional pitch polishing. Ion beam figuring becomes more and more common for final correction.…”

Section: Polishing Approachesmentioning

confidence: 99%

Analytical process design for chemo-mechanical polishing of glass aspheres

2011

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This work deals with the chemo-mechanical sub-aperture polishing of glass lenses using spiral tool path and pressure-inflated membrane tools. Current trends in manufacturing precision optics in Europe go to smaller lot sizes and an increasing ratio of custom specific lens design. This requires deterministic processes as well as methods for an analytical process set-up without empirical try-outs. Chemo-mechanical polishing is typically applied for pre-polishing step, which aims for smoothing the surface with moderate shape correction. But due to kinematic effects the spiral-polishing process often shows changes in the radius of curvature, which are right now corrected by empirical try-outs and iterative corrections. This paper suggests an analytical tool for the compensation of these effects and contributes doing so to an efficient pre-polishing of aspheres. A mathematical model calculates the local distribution of material removal. It is based on Preston's equation and takes into account the influence of the major input parameters, such as feed rate, spindle revolutions and spot size. The given results show a significant reduction in shape deviation applying this methods compared to a polishing process without any compensation

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Section: Polishing Approachesmentioning

confidence: 99%

Analytical process design for chemo-mechanical polishing of glass aspheres

2011

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“…To find and establish how to add DAO on the CCM, we are now investigating the performance and applicability of ion beam figuring (IBF) to our purpose (Allen and Romig 1990;Schindler et al 2001). …”

Section: Conclusion and Future Prospectsmentioning

confidence: 99%

Thermo-optical simulation and experiment for the assessment of single, hollow, and large aperture retroreflector for lunar laser ranging

et al. 2016

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A single aperture and hollow retroreflector [corner-cube mirror (CCM)] that in principle has no internal optical path difference is a key instrument for achieving lunar laser ranging one order or more accurate than the current level (~2 cm). We are developing CCM whose aperture is 20 cm with optimized dihedral angles. The 20-cm CCM yields two times peak height for returned laser pulse compared with Apollo 15's retroreflector. Two investigations were conducted to confirm the feasibility of the 20-cm aperture CCM. The first is thermo-optical simulation and evaluation of the 20-cm CCM in the lunar thermal environment. Through this simulation, it has turned out for the first time that 20-cm aperture CCM made of single-crystal Si or "ultra-low expansion glass-ceramics" such as CCZ-EX ® (OHARA Inc.) can be used for CCM with no thermal control, if the perfectly fixed point of CCM is limited to one. The second is annealing and shear loading experiments of single-crystal silicon (Si) samples. Through these experiments, high-temperature annealing from 100 to 1000 °C is confirmed to be effective for the enhancement of the adhesive strength between optically contacted surfaces with no optical damage in roughness and accuracy, indicating that this annealing process would enhance the rigidity of CCM fabricated by the optically contacted plates.

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“…Extremely high surface accuracy was demonstrated for a convex, spherical Zerodur mirror of rectangular shape (150 x 80 mm) after three iterative steps of IBE. Surface figure error was reduced from 316 nm p-v / 69 nm rms to 7 nm p-v / 0.9 nm rms (DIREKT100 DMI interferometer) [9]. Very smooth surfaces are obtained if total processing depths are kept to below 1 µm, and if more gentle IBE processing conditions are employed.…”

Section: Iom University Of Leipzig / Ntgl Ion Beam Finishing (Ibf)mentioning

confidence: 99%