<title>Laser fabrication and assembly processes for MEMS</title>

Abstract

This paper discusses the use of high power lasers in the manufacture of microelectromechanical systems (MEMS). The ability to process a wide range of materials, and to produce truly three-dimensional structures with tolerances at the micron or sub-micron level, give laser micromachining some key advantages over other more established micromachining techniques. Previous work in this area is reviewed, covering the following topics: use of ablation in the direct fabrication of MEMS devices and to define polymer masters for subsequent replication by electroforming and moulding (the so-called Laser-LIGA process); laser-assisted deposition and etching on planar and non-planar surfaces; laser-assisted manipulation of microparts and laser-assisted assembly.

<title>Laser micromachining for manufacturing MEMS devices</title>

“…Once a master has been made by excimer laser micromachining such methods allow high volumes of replica parts to be manufactured at low unit costs. Courtesy of Dr A Holmes Imperial College, University of London (5,9) Recent advances in personal healthcare and environmental monitoring have led to the development of different diagnostic devices that can perform a variety of analysis functions. The applications of such diagnostic 'chips' is widespread and includes food and water supplies, drug delivery systems, personal drug administration, DNA analysis, blood monitoring, cell sorters, pregnancy testing, etc.…”

“…MEMS device structures can be fabricated by direct laser ablative removal of material (5) . Examples of this technique are a biofactory-on-a-chip (BFC) described below, shaped bimorph actuators in silicon (6) and patterning of magnetic multilayer actuators (7) .…”

Rapid prototyping of polymer microsystems via excimer laser ablation of polymeric moulds

“…The production of a metal master tool is often time consuming and expensive. Several publications address rapid prototyping of polymer microsystems via direct machining with lasers, 4,5 by casting 6 or directly using a silicon mould. 7 Some authors describe a process where a tool is made in a polymeric material, which is then used for photo-moulding of a limited number of prototypes.…”

Experimental study on femtosecond laser micromachining of grooves in stainless steel

“…Precise metal machining down to the sub-micrometre scale, which is required for applications ranging from automotive industry [1] to consumer electronics [2], medicine [3], and production of microelectromechanical systems [4] is a nontrivial task even for the most advanced latest technology. Due to rigorous requirements for processing precision, performance, surface quality, structural intactness, and capital cost at the same time, micromilling, microelectric discharge machining, electrochemical milling with ultrashort voltage pulses, and laser micromachining are considered as leading methods [5].…”