&lt;title&gt;Laser interferometry: current trends and future prospects (Keynote Paper)&lt;/title&gt;

Hariharan, P.

doi:10.1117/12.135286

Cited by 3 publications

(2 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The mentioned interferometer operates using a laser diode, whose wavelength is sinusoidally modulated through a laser injection current; the demodulation process is based on the RRI technique. In comparison with other pseudo-heterodyne techniques, [7][8][9][10][11][12][13] RRI uses much stronger modulation excursions to obtain the range separation of the constituent signals. The interferometric approach enables the measurement of relative displacement with sub-nanometer precision 6 and allows to resolve multiple interference sources within a single optical signal, thereby opening up possibilities for new interferometer configurations.…”

Section: Introductionmentioning

confidence: 99%

OpenRRI: theory and application of open-source interferometry

Straube,

Hemeling,

Schwesinger

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

View full text Add to dashboard Cite

The OpenRRI project is an open-source project offering a free and ready-to-use post-processing interferometer implementation based on the Range-Resolved Interferometry (RRI) technique. It is provided with convenient software functionalities as well as a guide for setting up and operating RRI interferometers. The main advantage of pseudo-heterodyne interferometers, such as those using the RRI approach, compared to classic homodyne or heterodyne signal processing, is their cost-effectiveness while maintaining the ability to perform relative displacement measurements with sub-nanometer precision. The interferometer uses a fiber-coupled laser diode with a wavelength of 1550 nm, which is sinusoidally modulated by laser injection current. At the fiber-coupled, collimated measurement head, the interference between the back reflection of the free-space beam reflected by the target mirror and the fiber tip reflection leads to an interferometric signal at the optical detector that can be evaluated. Additionally, the RRI concept, unlike most pseudo-heterodyne interferometric techniques, could simultaneously interrogate multiple interference sources within a single optical setup, for example if multiple semi-transparent glass surfaces are present. The interferometric signal acquired by the optical detector then can be demodulated using the software functionalities provided by the OpenRRI project. In the first part, this contribution focuses on the working principle of the RRI and the features provided by the OpenRRI system. The second part then presents a novel interferometric setup based on the RRI technique, enabling interferometric point-to-point measurement outside the optical axis.

show abstract

Section: Introductionmentioning

confidence: 99%

OpenRRI: theory and application of open-source interferometry

Straube,

Hemeling,

Schwesinger

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

View full text Add to dashboard Cite

show abstract

“…This feature enables the development of new methods of interference signal processing [3]. The main focus of our work was to take advantage of the wavelength tunability to produce a simple profilometer set-up.…”

Section: Introductionmentioning

confidence: 99%

Interferometer with a wavelength-tuned diode laser for surface profilometry

Abou‐Zeid

Wiese

1998

Meas. Sci. Technol.

View full text Add to dashboard Cite

An interference profilometer has been developed which uses a diode laser as a non-expensive, compact and wavelength tunable light source. The profilometer works like an optical stylus and can be realized at relatively low expense. Two different methods of interference signal processing have been worked out. Both methods take advantage of the wavelength tunability of the diode laser. In connection with the development of the profilometer the spectral properties of different types of diode laser in the wavelength range from 780 nm down to 633 nm have been measured. The performance of the profilometer was proved by comparison measurements with a HeNe laser interferometer and by the measurement of well known surfaces. A measurement range of up to 100 m and a measurement uncertainty of better than 10 nm can be achieved.

show abstract

New structures for heterodyne interferometric probes using double-pass

Vairac

Cretin

1996

Optics Communications

View full text Add to dashboard Cite

<title>Laser interferometry: current trends and future prospects (Keynote Paper)</title>

Cited by 3 publications

References 18 publications

OpenRRI: theory and application of open-source interferometry

OpenRRI: theory and application of open-source interferometry

Interferometer with a wavelength-tuned diode laser for surface profilometry

New structures for heterodyne interferometric probes using double-pass

Contact Info

Product

Resources

About