&lt;title&gt;Mechanical properties of dielectric elastomer actuators with smart metallic compliant electrodes&lt;/title&gt;

Benslimane, Mohamed; Gravesen, Peter; Sommer‐Larsen, Peter

doi:10.1117/12.475160

Cited by 77 publications

(65 citation statements)

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“…6 Corrugated metal films are also opaque and have relatively small stretchability. 17 Carbon nanotubes, silver nanowires and graphene sheets exhibit considerable conductivity, but limited stretchability and transmittance. 14,[18][19][20] Whereas making highly stretchable and transparent electronic conductors has been challenging, a recent work has reported dielectric elastomer transducers using hydrogels as stretchable, transparent, ionic conductors.…”

Section: Introductionmentioning

confidence: 99%

Highly Stretchable and Transparent Ionogels as Nonvolatile Conductors for Dielectric Elastomer Transducers

Chen

Lü

Yang

et al. 2014

ACS Appl. Mater. Interfaces

241

205

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Large deformation of soft materials is harnessed to provide functions in the nascent field of soft machines. This paper describes a new class of systems enabled by highly stretchable, transparent, stable ionogels. We synthesize an ionogel by polymerizing acrylic acid in ionic Using the ionogel and a dielectric elastomer, we fabricate electromechanical transducers that achieve a voltage-induced areal strain of 140%. The ionogel is somewhat hygroscopic, but the transducers remain stable after a million cycles of excitation in a dry oven and in air. The transparency of the ionogels enable the transducers with conductors placed in the path of light, and the nonvolatility of the ionogels enable the transducers to be used in open air.

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Section: Introductionmentioning

confidence: 99%

Highly Stretchable and Transparent Ionogels as Nonvolatile Conductors for Dielectric Elastomer Transducers

Chen

Lü

Yang

et al. 2014

ACS Appl. Mater. Interfaces

241

205

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“…One membrane was activated, and the other acted as a counter-balancing spring. The actuation signal was 2.5 kV at 30 Hz, and more than 3 million cycles were demonstrated without change in the actuation strain or damage to the electrodes [58]. This technology has been developed by the Danfoss group in Denmark in collaboration with RISØ DTU.…”

Section: Metal Thin-film Electrodes On Corrugated Membranesmentioning

confidence: 99%

“…Metal thin-film deposition and patterning via photolithography are methods which are compatible with a microfabrication process flow, but prestretching is not, due to the need to remove the membrane from its substrate, mechanically deform it and fix it on a retaining frame. As an alternative method to mechanical or heat-induced prestretch to generate out-of-plane wavy electrodes, Benslimane et al have introduced the use of a structured dielectric elastomer membrane [58]. The silicone elastomer is applied on a mold with a quasi-sinusoidal corrugation profile.…”

Section: Metal Thin-film Electrodes On Corrugated Membranesmentioning

confidence: 99%

Flexible and stretchable electrodes for dielectric elastomer actuators

2012

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Dielectric elastomer actuators (DEAs) are flexible lightweight actuators that can generate strains of over 100%. They are used in applications ranging from haptic feedback (mm-sized devices), to cm-scale soft robots, to meter-long blimps. DEAs consist of an electrode-elastomer-electrode stack, placed on a frame. Applying a voltage between the electrodes electrostatically compresses the elastomer, which deforms in-plane or out-of plane depending on design. Since the electrodes are bonded to the elastomer, they must reliably sustain repeated very large deformations while remaining conductive, and without significantly adding to the stiffness of the soft elastomer. The electrodes are required for electrostatic actuation, but also enable resistive and capacitive sensing of the strain, leading to self-sensing actuators. This review compares the different technologies used to make compliant electrodes for DEAs in terms of: impact on DEA device performance (speed, efficiency, maximum strain), manufacturability, miniaturization, the integration of self-sensing and selfswitching, and compatibility with low-voltage operation. While graphite and carbon black have been the most widely used technique in research environments, alternative methods are emerging which combine compliance, conduction at over 100% strain with better conductivity and/or ease of patternability, including microfabrication-based approaches for compliant metal thin-films, metal-polymer nano-composites, nanoparticle implantation, and reel-to-reel production of µm-scale patterned thin films on elastomers. Such electrodes are key to miniaturization, low-voltage operation, and widespread commercialization of DEAs.

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“…Some work has been done to construct stiffer electrodes using compatible materials. For example, Benslimane et al [3] used a silver layer of 0.11 µm on a silicone elastomer of 50 µm and Pimpin et al [4] used slit electrodes of gold to reduce the constraining effect of the stiffer electrodes. In principle, the miniaturization of the electrostatically squeezed elastomers may be expected to result in a similar performance to air-gap electrostatic actuators or multi-layer actuators.…”

Section: Introductionmentioning

confidence: 99%

Actuated elastomers with rigid vertical electrodes

Lau

Goosen

Keulen

et al. 2006

J. Micromech. Microeng.

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This paper presents a novel design of actuated elastomers using rigid, vertical standing electrodes. The electrodes of high rigidity are designed to have small width, small gaps and large depth in order to produce large electrostatic forces at a moderate voltage, as well as to reduce the constraining effect on the soft elastomers. This novel design embodies lateral stacking to accumulate small strain into an adequate displacement for micro-actuation. Analytical and numerical analyses are performed to evaluate the force-displacement characteristics of the elastomer actuators. It is shown that actuation of the novel design is not limited by the electrostatic pull-in instability, and it is capable of travelling a large range at a high electric field. In addition, feasibility of fabrication processes is studied. It is shown that lateral stacking can readily be realized by filling liquid elastomers into deep, narrow and vertical trenches. A theoretical benchmark comparison with a conventional air-gap electrostatic comb drive indicates that the new elastomer actuator promises great flexibility, large attraction force and robustness against shock and dust blockage.

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<title>Mechanical properties of dielectric elastomer actuators with smart metallic compliant electrodes</title>

Cited by 77 publications

References 0 publications

Highly Stretchable and Transparent Ionogels as Nonvolatile Conductors for Dielectric Elastomer Transducers

Highly Stretchable and Transparent Ionogels as Nonvolatile Conductors for Dielectric Elastomer Transducers

Flexible and stretchable electrodes for dielectric elastomer actuators

Actuated elastomers with rigid vertical electrodes

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