&lt;title&gt;Mechanisms based on piezoactuators&lt;/title&gt;

Claeyssen, F.; Letty, R. Le; Barillot, F.; Lhermet, Nicolas; Fabbro, H.; Guay, Philippe; Yorck, M.; Bouchilloux, Philippe

doi:10.1117/12.429660

Cited by 28 publications

(23 citation statements)

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“…Such piezoelectric positioners can be used in atomic force microscopes for positioning the sample, in scanning tunneling microscopes for positioning the probe [6], lens and mirrors positioners for laser interferometers [7], in cellular manipulation [8], in microsurgery [9], and others.…”

Section: Introductionmentioning

confidence: 99%

Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements

et al. 2013

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Multiactuated piezoelectric flextensional actuators (MAPFAs) is a fast-growing technology in development, with a wide range of applications in precision mechanics and nanotechnology. In turn, optical interferometry is an adequate technique to measure nano/micro-displacements and to characterize these MAPFAs. In this work, an efficient method for homodyne phase detection, based on a well-known Bessel functions recurrence relation, is developed, providing practical applications with a high dynamic range. Fading and electronic noise are taken into account in the analysis. An important advantage of the method is that, for each measurement, only a limited number of frequencies in the magnitude spectrum of the photodetected signal are used, without the need to know the phase spectrum. The dynamic range for phase demodulation is from 0.2 to 100π rad (or 10 nm to 16 μm for displacement, using 632.8 nm wavelength). The upper range can be easily expanded by adapting the electronic system to the signal characteristics. By using this interferometric technique, a new XY nanopositioner MAPFA prototype is tested in terms of linearity, displacement frequency response, and coupling rate.

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Section: Introductionmentioning

confidence: 99%

Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements

et al. 2013

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“…where C H and C 0 are the Young's modulus of the homogenized material and basic material that will be distributed in the domain, respectively, ρ 1 is a pseudo-density describing the amount of material at each point of the design domain, which can assume values between 0 and 1, and p ∈ [1,4] is a penalization factor to recover the discrete design. For ρ 1 equal to 0 the material is equal to void, and for ρ 1 equal to 1 the material is equal to solid material.…”

Section: Design Problem Formulationmentioning

confidence: 99%

“…The multiflexible structure acts as a mechanical transformer by amplifying and changing the direction of the piezoceramics output displacements. 4 Thus, the development of these piezoelectric micro-tools requires the design of actuated compliant mechanisms 5 that can perform detailed specific movements.…”

Section: Introductionmentioning

confidence: 99%

Multi-actuated functionally graded piezoelectric micro-tools design using topology optimization

Carbonari¹,

Silva²,

Paulino

2006

Smart Structures and Materials 2006: Modeling, Signal Processing, and Control

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The micro-tools considered in this work consist essentially of multi-flexible structures actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and on different directions. The multiflexible structure acts as a mechanical transformer by amplifying and changing the direction of the piezoceramics output displacements. Micro-tools offer significant promise in a wide range of applications such as cell manipulation, microsurgery, and micro/nanotechnology processes. Although the design of these micro-tools is complicated due to the coupling among movements generated by various piezoceramics, it can be realized by means of topology optimization concepts. Recently, the concept of functionally graded materials (FGMs) has been explored in piezoelectric materials to improve performance and increase lifetime of piezoelectric actuators. Usually for an FGM piezoceramic, elastic, piezoelectric, and dielectric properties are graded along the thickness. Thus, the objective of this work is to study the influence of piezoceramic property gradation in the design of the multiflexible structures of piezoelectric micro-tools using topology optimization. The optimization problem is posed as the design of a flexible structure that maximizes different output displacements or output forces in different specified directions and points of the domain, in response to different excited piezoceramic portions: while minimizing the effects of movement coupling. The method is implemented based on the solid isotropic material with penalization (SIMP) model where fictitious densities are interpolated in each finite element, providing a continuum material distribution in the domain. As examples, designs of a single piezoactuator and an XY nano-positioner actuated by two FGM piezoceramics are considered. The resulting designs are compared with designs considering homogeneous piezoceramics. The present examples are limited to two-dimensional models because most of the applications for such micro-tools are planar devices.

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“…Porém alguns autores [35,38,60] realizam os projetos de transdutores piezelétricos de forma bidimensional, através de técnicas computacionais, baseadas no método de elementos finitos. As análises por elementos finitos mostram-se uma ferramenta de simulação de transdutores piezelétricos com resultados muito próximosà realidade [43].…”

Section: Materiais E Métodosunclassified

“…A camada metálica tinha a função de amplificar as ondas acústicas geradas pela barra Um piezoatuador flextensionalé projetado para trabalhar em regime de excitação estática, ou seja, alimentado por uma tensão elétrica constante, ou então em regime semi-estático, ou seja, alimentado por uma onda senoidal contínua a baixas-freqüências (menores que 10 kHz). Algumas das aplicações de um piezoatuador flextensional são como nanoposicionador [39,60], motores piezelétricos [40], hidrofones [42,81] e sonares [41]. A contração da piezocerâmica na direção 1, produz um grande deslocamento da estrutura flexível na direção 3.…”

Section: Atuador Piezelétrico Flextensionalunclassified

Desenvolvimento de técnicas de caracterização de transdutores piezelétricos.

Nader¹

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<title>Mechanisms based on piezoactuators</title>

Cited by 28 publications

References 0 publications

Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements

Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements

Multi-actuated functionally graded piezoelectric micro-tools design using topology optimization

Desenvolvimento de técnicas de caracterização de transdutores piezelétricos.

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