&lt;title&gt;MEMSMaster: a new approach to prototype MEMS&lt;/title&gt;

Moulinier, David; Metsu, Philippe; Brutails, Marie-Pierre; Bergeon, Stéphane; Nachtergaele, Philippe

doi:10.1117/12.425365

Cited by 7 publications

(4 citation statements)

References 2 publications

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“…Existing circuit-level representations for suspended MEMS include MEMSPro [6], ARCHITECT [7], SUGAR [8], MEMSMaster [9] and NODAS [10]. In these methods, systems are represented from structure using atomic elements such as anchors and beams.…”

Section: Existing Simulation Methodologiesmentioning

confidence: 99%

Schematic-based lumped parameterized behavioral modeling for suspended MEMS

Jing

Mukherjee

Fedder

2002

Proceedings of the 2002 IEEE/ACM International Conference on Computer-Aided Design - ICCAD '02

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Schematic-based lumped parameterized behavioral modeling and simulation methodologies have become available since the emergence of analog HDLs. They greatly ease iterative hierarchical multi-domain simulation, which is critical to the design of MEMS. NODAS is one of such tools, with models written in VerilogA and simulation performed within the Cadence framework.This paper focuses on several key modeling issues in NODAS, including schematic representation, element communication, linear, nonlinear and multi-domain modeling, and extensibility to new physical effects, processes and physical domains. A nonlinear beam model and an electrostatic gap model are discussed as examples. Simulation comparison to finite element analyses and experimental data verifies the accuracy of the models and validates the simulation methodology.

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Section: Existing Simulation Methodologiesmentioning

confidence: 99%

Schematic-based lumped parameterized behavioral modeling for suspended MEMS

Jing

Mukherjee

Fedder

2002

Proceedings of the 2002 IEEE/ACM International Conference on Computer-Aided Design - ICCAD '02

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“…Equation governing the translation according to Newton's second law can be written as m = && F r (4) where m is the lumped mass of plate-mass, T [ ] , , 12 12 12…”

Section: Modeling Of Rigid Plate-massmentioning

confidence: 99%

System-level modeling of segmented deformable micromirror using multi-port-element network method

et al. 2006

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This paper presents the development of system-level modeling and simulation of segmented deformable micromirror. We represent a system-level modeling methodology called Multi-Port-Element Network (MuPEN) method for micromirror design which is different from conventional finite-element analysis(FEA) and boundary-element analysis(BEA) method in the paper. Based on this method, the segmented deformable micromirror is decomposed into functional components such as rigid plate-mass, spring beam and electrostatic gap. MuPEN models of functional components have been generated and are coded in MAST language. Then a system-level model of segmented deformable micromirror is established using MuPEN models and both static and dynamic simulation is implemented in SABER. The resonance frequency, the pull-in voltage and the response time of the micromirror are ascertained through different simulations and the simulation results show that the micromirror we designed can satisfy the adaptive optical system requirements. Besides, the frequency analysis results are verified by comparison with ANSYS simulations, and the results prove that MuPEN method has near FEM accuracy. In addition, transient analysis results indicate that the computation cost is low enough and the simulation of complicated electro-mechanical coupled system which is hardly completed by FEM software can be accomplished quickly in this way.

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“…12). MemsMaster [14] provides a structured approach to prototype MEMS structures, which couples the nodal method and the FEM method. Using a symbolic representation as an input, it generates a behavioral description and a layout description of a device, written in CIF or GDSII formats.…”

Section: Current Workmentioning

confidence: 99%

“…All geometrical dimensions are concerned (layout of Fig. 8), 4 for the springs (1, 2, 3, 9), 3 for the shuttle (4, 5, 6), 7 for the comb drives (7,8,10,11,12,13,14).…”

Section: Principlementioning

confidence: 99%

<title>Parametric yield enhancement of a microresonator using statistical optimization tools</title>

Delauche

Affour

Dufaza³

2001

SPIE Proceedings

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High volume ICs production companies (telecom, etc) show a growing interest in MEMS components, especially RF and optical ones. Prototypes of integrated inductances and optical switches demonstrate very promising performances. The transition to the high volume production implies the development of Design For Manufacturability (DFM) tools featured to handle MEMS specific processes and related problems such as yield loss due to process dispersion. These tools must be part of a MEMS dedicated CAD environment. This paper presents results of what could be yield enhancement using usual statistical optimization tools and methods, and a new approach currently developed by MEMSCAP and LIRMM, based on response variability minimization.

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<title>MEMSMaster: a new approach to prototype MEMS</title>

Cited by 7 publications

References 2 publications

Schematic-based lumped parameterized behavioral modeling for suspended MEMS

Schematic-based lumped parameterized behavioral modeling for suspended MEMS

System-level modeling of segmented deformable micromirror using multi-port-element network method

<title>Parametric yield enhancement of a microresonator using statistical optimization tools</title>

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