&lt;title&gt;Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures&lt;/title&gt;

Lawton, Russell A.; Lin, G.; Wellman, J.; Phinney, Leslie M.; Uribe, José Ignacio; Griffith, Edward; Wolf, Ingrid De; Lawrence, Eric M.

doi:10.1117/12.395698

Cited by 5 publications

(3 citation statements)

References 6 publications

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“…The continued growth of MEMS and MST and the transfer of micromachined sensors and actuators from the laboratory to the marketplace depend on the development of failure analysis and reliability testing techniques. To correctly interpret and predict the behavior of microfabricated parts, visualization and characterization methods for microdevices are necessary [1].…”

Section: Introductionmentioning

confidence: 99%

Surface roughness measurements of micromachined polycrystalline silicon films

Phinney

Lin

Wellman

et al. 2004

J. Micromech. Microeng.

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The characteristics of the materials and surfaces in microelectromechanical systems (MEMS) and microsystems technology (MST) profoundly affect the performance, reliability, and wear of MEMS and MST devices. It is critical to measure the properties of surfaces that are in contact during microstructure movement, such as the underside of a MEMS gear and the underlying substrate. However, contacting surfaces are usually inaccessible unless the MEMS device is broken and removed from the substrate. This paper presents a nondestructive method for characterizing commercially fabricated surface micromachined polycrystalline silicon (polysilicon) devices. Microhinged flaps were designed that enable access to the upper surface, the part of a structural layer deposited last; the lower surface, the part of a structural layer deposited first; and the underlying substrate. Due to the susceptibility of surface-micromachined MEMS to adhesion failures, the surface roughness is a key parameter for predicting device behavior. Using the microhinged flaps, the RMS surface roughness for polycrystalline surfaces was measured and indicated that the upper surfaces were 3.5-6.4 times rougher than the lower surfaces. The difference in the surface roughness for the upper surface, which is easily accessed and the one most commonly characterized, and that for the lower surface reveals the importance of characterizing contacting surfaces in MEMS and MST devices.

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Section: Introductionmentioning

confidence: 99%

Surface roughness measurements of micromachined polycrystalline silicon films

Phinney

Lin

Wellman

et al. 2004

J. Micromech. Microeng.

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“…Also it is very difficult to manipulate and position detached MEMS devices for testing and characterization. Lawton et al (2000) and Phinney et al (2004) developed a technique using microhinged flaps to measure the root-meansquare (RMS) roughness of MEMS devices. The flaps were hinged on one side allowing them to be rotated or flipped.…”

Section: Introductionmentioning

confidence: 99%

Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

2007

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Polycrystalline silicon (polysilicon) films are primary structural materials for microelectromechanical systems (MEMS). Due to relatively high compliance, large surface-to-volume ratio, and small separation distances, micromachined polysilicon structures are susceptible to surface forces which can result in adhesive failures. Since these forces depend on surface properties especially surface roughness, three types of microhinged flaps were fabricated to characterize their roughness and adhesive meniscus properties. The flaps enabled access to both the top and bottom surfaces of the structural polysilicon layers. Roughness measurements using an atomic force microscope revealed that MEMS surfaces primarily exhibit non-Gaussian surface height distributions, and for the release procedures studied, the bottom surface of the structural layers was significantly smoother and prone to higher adhesion compared to the top surface. A non-symmetric surface roughness model using the Pearson system of frequency curves was coupled with a capillary meniscus adhesion model to analyze the effects of surface roughness parameters (root-meansquare, skewness, and kurtosis), relative humidity, and surface contact angle on the interfacial adhesion energy. Using the measured roughness properties of the flaps, four different surface pairs were simulated and compared to investigate their effects on capillary adhesion. It was found that since the base polysilicon layer (poly0) was rougher than the base silicon nitride and the structural layer on poly0 was also rougher than that on silicon nitride, depositing MEMS devices on poly0 layer rather than directly on silicon nitride will reduce the adhesion energy.

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“…Raman spectrometer can be used for identifying stress and temperature dependence of the materials [6][7][8][9][10]. COMSOL Multiphysics is suitable software package for small scale electro thermal analysis since a separate MEMS module is present in it [11,12].…”

Section: Raman Spectroscopy and Comsol Multiphysics Overviewmentioning

confidence: 99%

Characterization and Experimental Investigation of Tin Micro Tubular Coil Heater Using Raman Spectroscopy

Sureshkannan¹,

Kumar²,

Saravanan³

2013

Archives of Metallurgy and Materials

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Raman spectroscopy is a commonly used tool in bio-diagnostics and micro sensor technology. Surface-enhanced Raman scattering provides high signal enhancements especially at micro and nanostructured metallic surfaces. Micro tubular coil heaters have been widely investigated because of their extensive applications in PET Preformed Moulds, Hot Runner Nozzles & Bushings and Thin Walled Container Moulds and other Microsystems. This paper describes the characterization, experimental investigation and analysis of Titanium Nitride (TiN) micro tubular coil heater using Raman spectroscopy and Comsol multiphysics. The material characterization was performed using Raman spectrometer and the geometric optimization for the micro tubular coil heater was performed by simulating a wide range of possible geometries using COMSOLTM, a commercial Finite Element Analysis (FEA) package. The characteristic dimensions of the microstructures are varied and the results are discussed and compared to each other. The simulated results of micro tubular heaters having an improved temperature distribution over the sensing area and a higher density of integration is presented in this paper.

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<title>Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures</title>

Cited by 5 publications

References 6 publications

Surface roughness measurements of micromachined polycrystalline silicon films

Surface roughness measurements of micromachined polycrystalline silicon films

Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

Characterization and Experimental Investigation of Tin Micro Tubular Coil Heater Using Raman Spectroscopy

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