&lt;title&gt;Microfabrication and packaging of deformable mirror devices&lt;/title&gt;

Ross, A.W.S.; Graham, Stephen C.; Gundlach, A.M.; Stevenson, J.T.M.; Hossack, W.J.; Vass, D.G.; Bodammer, G.; Smith, E. C.; Ward, Kevin

doi:10.1117/12.397934

Cited by 2 publications

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“…The membrane material has a significant influence on the flexibility of the device and ultimately on its performance. Polymer membranes have been proposed as an alternative solution to silicon membranes [11,12]. However, careful consideration of the CTE (coefficient of thermal expansion) mismatch between different materials must be taken into account [11].…”

Section: Introductionmentioning

confidence: 99%

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Design and fabrication of a large-stroke MEMS deformable mirror for wavefront control

Lin

Hsieh

2011

J. Opt.

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Adaptive optics is a technology that improves the performance of optical systems by reducing wavefront distortion. Currently, it is playing a more important role in astronomy, laser physics, nonlinear optics, medicine, vision and the defense industry. In this paper, we demonstrate a microelectromechanical system (MEMS) deformable mirror that is made of a 2.15 µm thick polyimide film and is actuated by electrostatic force. We made a large-stroke MEMS deformable mirror with a 20 mm diameter circular opening and 67 hexagonal actuation electrodes. We also used modeling software, ANSYS, to simulate the deformation behavior of the membrane and discussed the device parameter tuning for versatile applications. The maximum stroke was 39 µm as 195 V was applied. Because of the large stroke of the device, the resonant frequency was approximately 40 Hz. The resonant frequency can be increased by thickening the polyimide membrane. The polymer deformable mirror is a strong candidate for active wavefront control, based on our experimental results.

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Section: Introductionmentioning

confidence: 99%

“…However, careful consideration of the CTE (coefficient of thermal expansion) mismatch between different materials must be taken into account [11]. Besides, the air-damping effect during actuation is also important for a large membrane area [12] to achieve a desirable response time.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a large-stroke MEMS deformable mirror for wavefront control

Lin

Hsieh

2011

J. Opt.

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“…We mention only techniques with the use of electrostatics for changing a surface shape and correction of its errors (see, for example, [4,22,44,[59][60][61]). …”

Section: Super-light Mirrorsmentioning

confidence: 99%

Study Of Pre-Shaped Membrane Mirrors And Electrostatic Mirrors With Nonlinear-Optical Correction

Dimakov¹,

Emel'yanov²

2002

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Washington Headquarters Services, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget,, Washington, DC 20503. AGENCY USE ONLY (Leave blank)2. REPORT DATE This report results from a contract tasking Research Institute for Laser Physics as follows: The aim of this work is to improve low-weight membrane mirror characteristics intended for relaying laser communication beams in space. Such systems would use a non-linear-optical corrector to correct surface figure and other optical aberrations. The analytical part of this project is aimed at estimating the feasibility of designing the mirrors based on the pre-shaped membranes. This evaluation will give a clear understanding of the approaches to forming super-light mirrors as well as of the problems anticipated in creating this new generation of space mirrors. In the course of the experimental work, a low-weight mirror model based on the pre-shaped membrane will be fabricated, and its optical characteristics will be studied. It is expected that the characteristics predicted theoretically will be observed experimentally. The first quarterly report on project 2103p (ISTC 00-7032), entitled "Study of pre-shaped membrane mirrors and electrostatic mirrors with nonlinear-optical correction." Large telescopes and super light mirrors OverviewNowadays a number of scientific and practical fields of activity need solutions of the problems requiring high-resolution of both ground and space based telescopes with substantial space penetrating power, namely ones with large aperture mirrors.First of all, these high-resolution physical instruments are required for astronomic observations. For example, the National Research Council of the National Academy of Sciences of the USA states the strategic tasks of astronomic observations as follows: "We must use the universe as a laboratory -a unique laboratory -for probing the laws of physics in regimes not accessible on Earth, such as the very early universe or near the event horizon of a black hole." "We must search for life beyond the Earth and, if it is found, determine its nature and its distribution. And finally, we must develop a conceptual framework that accounts for all that we have observed," the report says [1]. Note that at present the requirements to a telescope for some tasks [2] are the resolution of the order of 10 -3 arcsec and space penetrating power of stars of the 35th-38th magnitude. This means that a primary mirror must be of the order of 100m in diameter.Obviously, high-resolution...

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<title>Microfabrication and packaging of deformable mirror devices</title>

Cited by 2 publications

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Design and fabrication of a large-stroke MEMS deformable mirror for wavefront control

Design and fabrication of a large-stroke MEMS deformable mirror for wavefront control

Study Of Pre-Shaped Membrane Mirrors And Electrostatic Mirrors With Nonlinear-Optical Correction

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