&lt;title&gt;Micromachining with a frequency-converted diode-pumped Nd:YAG laser&lt;/title&gt;

Hartke, Kevin; King, K.; Farson, Dave F.; Ely, Kevin

doi:10.1117/12.405712

Cited by 3 publications

(2 citation statements)

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“…To understand and characterize laser micromachining for this meso-/micro-SFF process, plates of stainless steel 316L (0.792 mm thick) and copper plates The 3rd and 4th harmonic laser beams were selected as the subtractive tool due to their higher absorbance by metal than a visible or an infrared beam at 532 nm or 1064 nm, respectively. It is also well understood that Nd:YAG lasers at wavelengths of 355 nm and 266 nm can be used for micromachining of different materials [23][24][25][26]. A focusing lens, with the focal length of 135.3 mm at a wavelength of 355 nm, and 128.9 mm at a wavelength of 266 nm, was used to focus the input laser beam to a diameter of 3.0 mm.…”

Section: Laser Micromachiningmentioning

confidence: 99%

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Experimental study on integration of laser-based additive/subtractive processes for meso/micro solid freeform fabrication

Choi

Yang

2004

Int J Adv Manuf Technol

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Solid freeform fabrication has attracted considerable attention lately because of its ability to build a 3D structure with a complex and arbitrary shape. This work presents initial studies to adapt this technology for the fabrication of meso-/micro-3D structures. A pulsed Nd:YAG laser was used for laser microdeposition (additive) and micromachining (subtractive) processes. An ultrasonic-based micropowder feeding system was developed to generate precise patterns of micropowders on a substrate without any pre-processing. Laser microdeposition of copper and stainless steel micropowders was accomplished. The characterization of micromachining was performed on stainless steel and copper plates with a laser beam of wavelengths of 355 nm and 266 nm. The integration of laser microdeposition and micromachining processes improved the resolution and edge quality of the meso-/micropatterns.

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Section: Laser Micromachiningmentioning

confidence: 99%

“…Laser micromachining, especially with an excimer laser, has been used on a wide range of materials: polymers, ceramics, semiconductors, and metals [19][20][21][22]. Recently, Nd:YAG lasers at wavelengths of 355 nm and 266 nm have been used for micromachining of different materials [23][24][25][26].…”

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confidence: 99%