<title>Modification of thin metal and ceramic films by UV and IR laser radiation</title>

Abstract

Investigation of the modes of thin metal and ceramic films (0,3-1 m) removal from the glass and stainless steel substrate by IR and UV laser radiation has been performed. It is presented that the efficient film destruction and removal occurs due to laser induced thermal strength under laser fluxes ofO.5 J/cm2 not sufficient for phase transformation.