&lt;title&gt;Novel high-speed 3-DOF linear direct drive operating with submicron precision&lt;/title&gt;

Sprenger, B.; Siegwart, Roland

doi:10.1117/12.298047

Cited by 4 publications

(3 citation statements)

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“…In document [1,2], three independent PID controllers are used to control the levitation altitude of T-shaped mover's three sides and only studies the particular case when the position of the mover centroidal is x=0 and y=0. The method has low positioning accuracy and poor robustness.…”

Section: Introductionmentioning

confidence: 99%

Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller

Zhou¹,

Qu²,

Liu³

2013

AMR

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In the present study, we proposed a magnetic levitation positioning stage for the high-precision positioning and scanning tasks in micro-electronics manufacturing and precision machining. This stage consists of a thrust system and a levitation system, the latter is a strong-coupling and nonlinear MIMO system related closely to both levitation height of each terminal magnetic bearing and instantaneous plane location of the movers and is focused on in our study. The dynamic model of this levitation system is so complicated that it is very difficult to obtain an ideal control accuracy and robustness by linear control theory, therefore, an improved auto-disturbance rejection controller was designed to realize decoupling and disturbance rejection and overcome the rough characteristics of traditional auto-disturbance rejection controller. The simulation and experiment showed that the performance of improved auto-disturbance rejection controller is superior to the traditional auto-disturbance rejection controller and with a better dynamic，static and robust performance.

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Section: Introductionmentioning

confidence: 99%

Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller

Zhou¹,

Qu²,

Liu³

2013

AMR

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“…上的精密驱动，定位精度主要还在微米级．美国麻省理工大学(MIT)生物仪器实验室 (BioInstrumentation Laboratory)研制的微小机器人 NanoWalker [1][2][3] ，其尺寸为 3.2 cm×3.2 cm，通过给压电陶瓷施加电压让脚产生振动来驱动机器人，精度可以达到 30 nm．MIT 提出两种基于 VCM 的 2 自由度微型弹跳机器人，模型直径分别为 30 mm 和 14 mm [4] ．德国卡尔斯鲁厄大学研制的 MiniMan 系列机器人 [5] ，采用管装压电陶瓷驱动三腿式机器人，可以在显微镜下实现 Φ500 µm 微型行星齿轮减速器的装配和花粉细胞分离等精密微作业．日本东京大学和骏河精机公司联合研发了 3 自由度微机器人 [6] ，通过微步进马达的运动分解细化，运动分辨率达到 0.1 µm/step，能够捕捉几微米的细胞．日本电气通信大学青山研究室基于积层式压电驱动研发了惯性驱动微小机器人和电磁驱动微小机器人 [7] ，每步的分辨率达到 25 nm/step，倾斜角度分辨率为 0.002 • /step，能够胜任微装配和微操作工作．瑞士洛桑理工大学将 VCM 作为驱动装置应用在微小机器人和精密制造中，并应用到 3 维测量和电火花微加工当中，但由于尺寸较大，没有应用在显微操作中 [8][9][10] ．我国微小机器人的研究起步较晚，但取得了很大的成绩．哈尔滨工业大学基于宏／微复合驱动原理研制了面向微操作的微小型机器人 [11][12][13] ，宏动部分由微电机驱动，微动部分由压电陶瓷和电磁体驱动；在此基础上，又提出了基于非谐振条件下的粘滑运动机理和谐振条件下的碰撞运动机理的微小机器人驱动机构，定位精度达到亚微米级 [14][15] ．上海大学先后研制了电磁力驱动的步进式管内移动微型机器人、基于双压电膜驱动的惯性冲击原理的微型机器人和不需要软轴驱动的螺旋式小电机驱动机器人，用于细小管道的检测 [16] ．南开大学开发了"面向生物工程的微操作机器人系统" [17] ，采用牛顿环中心位置标定微操作机器人坐标系，测量精度为亚微米量级．此外，中国科技大学、中国科学院沈阳自动化研究所、北京航空航天大学、上海交通大学等也纷纷开展了微小型机器人的研究 [18][19][20]…”

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Development and Application of a Hybrid-drive Miniature-robot for Micromanipulation

Zhang

Du²,

Zhibin³

et al. 2012

Robot

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A hybrid-drive miniature-robot for micromanipulation is proposed. The robot consists of a planar mobile module and a vertical micro-motion module. Based on the principle of inchworm peristalsis, the planar mobile module driven by stacked piezoelectric ceramics may move like a mobile robot on a magnetic plane through cooperation of two electromagnetic nuts, such as moving forward or backward, turning left or right, and rotating with zero radius on a surface. The vertical inching module is driven by a linear voice coil motor (LVCM). With an improved structure different from those of traditional VCMs, the proposed LVCM gets rid of the nonlinear problems such as high frequency vibration when driven in the gravity direction and low precision with traditional VCMs, and hence achieves frictionless vertical motion. The driving principles, performance and payload characteristics of the modules are analyzed, and an experimental application in automatic focusing for micromanipulation is carried out to verify the effectiveness and application feasibility of the presented hybrid-drive miniature-robot system.

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“…al. [100,101]. The authors developed a 3-DOF positioner using four linear-drive actuators with a planar air bearing ( Fig.…”

Section: Covefkmentioning

confidence: 99%

Flexure-based electromagnetic parallel-kinematics manipulator system

Teo¹

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Manipulation between the nano and meso scales at elevated bandwidth with large continuous output force remains as a technological gap in the field of ultra-high precision manipulation over the past decades. Current ultra-high precision manipulators are incompetent of bridging this gap due to their failure in recognizing the inter-dependency between each subsystem, e.g., the positioning mechanisms, the nano-positioning actuators and the control systems etc. This research focuses on the development of a multiple degrees-of-freedom Flexure-Based Electromagnetic Parallel-Kinematics Manipulator (FEPM) targeted with several capabilities, i.e., nanometric resolution, large continuous output force, fast actuating speed, high system stiffness and a large workspace of a few millimeters and degrees, so as to bridge the existing technological gap. Each subsystem is investigated with the inter-dependency between these subsystems being taken into consideration. Consequently, these subsystems are treated as one unified mechatronics system with a common goal, i.e., to realize those targeted capabilities. In this research, a new analytical model, termed semi-analytic model, is formulated to predict the nonlinear deflection of a beam-based flexure joint coupled with various rigid-link lengths. Experimental investigations have shown that this analytical model provides a highly accurate solution with an average deviation of 2.3% when compared to the experimental results. A new magnetic circuit is introduced to address the low output force limitation of a Lorentz-force actuation. Termed Dual-Magnet (DM) configuration, it offers a large effective air gap and increases the magnetic flux density by 40%. Hence, an Electromagnetic Driving Module (EDM) that adopts the DM configurations can achieve a large continuous output force through small input current and a compact-sized module.

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<title>Novel high-speed 3-DOF linear direct drive operating with submicron precision</title>

Cited by 4 publications

References 4 publications

Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller

Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller

Development and Application of a Hybrid-drive Miniature-robot for Micromanipulation

Flexure-based electromagnetic parallel-kinematics manipulator system

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