&lt;title&gt;Observation of excitation discharge on an excimer laser in nonuniform gas density distribution&lt;/title&gt;

Imada, Go; Suzuki, Yasuo; Yoshida, Hiroyuki; Masuda, Wataru; Yatsui, Kiyoshi

doi:10.1117/12.294506

Cited by 7 publications

(6 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The steady-state gas pressure (p 0 ) is 215 kPa and becomes 0.69 kg/m 3 when converted into gas density U 0 . This is the pressure at which a stable glow discharge can be obtained in a stable gas [1].…”

Section: Methodsmentioning

confidence: 98%

“…As part of the research and development of the highly repetitive TEA gas laser, the authors group has been carrying out experiments on high-pressure pulsed glow discharge in a high-speed gas flow [1,10]. From this series of experiments, it was learned that the gas density depletion generated by the discharge is swept away by the gas flow and moved to the downstream side, and the arc occurs through this portion when the repetition rate of the pulse discharge becomes higher.…”

Section: Introductionmentioning

confidence: 98%

“…However, under highly repetitive operation, uniform glow cannot be maintained, and finally the arc will occur and the laser oscillation will stop. The causes of arc occurrence at high repetition are regarded to be the following remaining behind in the discharge space and disturbing the electric field at the time when the next pulse voltage is applied: (1) gas density depletion (the gas is heated instantly and the gas density of the discharge portion drops several percent) [1,2]; (2) ions (the negative ions having long lifetimes remain) [3]; (3) shock waves (those with Mach number of 1 to 3 repeat reflection in the discharge space) [4,5]; (4) discharge products (sputtering materials of electrodes and so on float between electrodes) [6]; and (5) temperature rise of electrodes (the gas near electrodes is heated and local gas density nonuniformity occurs) [7]. However, the influences of the respective factors on arc occurrence have not been clarified.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Influences of gas density depletion on high-pressure, pulsed-glow discharge

2000

Self Cite

View full text Add to dashboard Cite

High‐pressure, pulsed glow discharge has been studied for the excitation discharge in TEA gas lasers. Various instabilities occur in the subsequent discharge, which induce the arc and collapse for the highly repetitive operation. In this paper, the influences of the gas density depletion on the high‐pressure, pulsed glow discharge have been investigated, eliminating the other instabilities such as shock waves, residual ions, discharge products, and electrode heating. The gas density depletion was produced by utilizing a subsonic flow between the curved electrodes. The comparison has been made on the discharge occurring in the presence of the gas density depletion with that by the double‐pulse experiment in a stable gas. The big gas density nonuniformity tends to cause the arc without the shocks, ions, discharge products, and electrode heating. The transition from glow to arc discharge discontinuously occurs with respect to the gas density depletion. On the other hand, the second discharge in the double‐pulse experiment becomes an arc in much smaller gas density nonuniformity, and the transition from glow to arc occurs gradually. The arc discharge might be driven by some factors other than the gas density depletion. © 2000 Scripta Technica, Electr Eng Jpn, 130(4): 9–16, 2000

show abstract

Section: Methodsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Influences of gas density depletion on high-pressure, pulsed-glow discharge

2000

Self Cite

View full text Add to dashboard Cite

show abstract

“…(p/p0) w (2) where (Aptp0) is the depth of the density depletion and W is the full width at ten-percent-maximum width of the depth of density depletion.…”

Section: Introductionmentioning

confidence: 99%

Characteristics of excitation discharge of an excimer laser in gas density depletion

1998

Self Cite

View full text Add to dashboard Cite

The influences of gas density depletion on the highly-repetitive, high-pressure, pulsed glow discharge for excitation of excimer laser have been investigated eliminating the other instabilities, such as shock waves, residual ions, discharge products and electrode heating. The gas density depletion is simulated by utilizing a subsonic flow between the curved electrodes. The comparison has been made on the discharge occurred in the presence of the gas density depletion with the second discharge on the double-pulse experiment. We have found that the big gas density non uniformity, Ap/p0 3.6 % corresponding to a pulse repetition rate (PRR) of' 20 Hz, tends to cause the arc discharge without the shocks, ions, discharge products and electrode heating.On the other hand, the second discharge on the double-pulse experiment becomes arc discharge in much smaller non uniformity (Ap/p0 1 .2 % corresponding to PRR 3 Hz).The arc discharge in the double-pulse experiment might be driven by the residual ions and/or discharge products other than gas density depletion except for PRR >20 Hz.

show abstract

Section: Introductionmentioning

confidence: 99%

Influences of Gas Density Depletion on High-Pressure, Pulsed Glow Discharge

1998

Self Cite

View full text Add to dashboard Cite

High-pressure, pulsed glow discharge has been studied for the excitation discharge in TEA gas lasers.Various instabilities occur in the subsequent discharge, which induce the arc and collapse for the highly-repetitive operation. In this paper, the influences of the gas density depletion on the high-pressure, pulsed glow discharge have been investigated eliminating the other instabilities such as shock waves, residual ions, discharge products and electrode heating.The gas density depletion was produced by utilizing a subsonic flow between the curved electrodes. The comparison has been made on the discharge occurred in the presence of the gas density depletion with that by the doublepulse experiment in a stable gas.The big gas density non-uniformity tends to cause the arc without the shocks, ions, discharge products and electrode heating.The transition from glow to arc discharge discontinuously occurs with respect to the gas density depletion.On the other hand, the second discharge in the double-pulse experiment becomes arc in much smaller gas density non-uniformity, and the transition from glow to arc occurs gradually.The arc discharge might be driven by some factors other than the gas density depletion.

show abstract

<title>Observation of excitation discharge on an excimer laser in nonuniform gas density distribution</title>

Cited by 7 publications

References 0 publications

Influences of gas density depletion on high-pressure, pulsed-glow discharge

Influences of gas density depletion on high-pressure, pulsed-glow discharge

Characteristics of excitation discharge of an excimer laser in gas density depletion

Influences of Gas Density Depletion on High-Pressure, Pulsed Glow Discharge

Contact Info

Product

Resources

About