2002
DOI: 10.1117/12.475095
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<title>Piezoelectric direct drive servovalve</title>

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Cited by 41 publications
(38 citation statements)
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“…The construction of flapper has a multimorph structure in which two PMN thin plates are bonded on both sides of a phosphor bronze shim. When a high voltage is applied on the electrodes between the two PMN plates, the structure enhances [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…The construction of flapper has a multimorph structure in which two PMN thin plates are bonded on both sides of a phosphor bronze shim. When a high voltage is applied on the electrodes between the two PMN plates, the structure enhances [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…Electromechanical converters, which are key components of servo valves, have a great effect on their performance. Thus, research on high-speed and high-precision servo valves aims at the replacement of conventional electromagnetic electromechanical converters by high-precision and high-response prestage drivers [1,2]. In recent years, piezoelectric materials have been the primary choice of electromechanical converters because of good linearity, high response, high precision, absence of electromagnetic interference, and easy miniaturization.…”
Section: Introductionmentioning
confidence: 99%
“…Perfect performance of smart actuators, such as high-response, high power density and compactness can be used to improve the competitiveness of hydraulic products [3] . Compared with the magnetostrictive and solenoid actuators, the piezoelectric (named PZT) actuator has the following advantages: fast response (up to GHz), high output force (kN), low energy consumption (current of mA) and low cost.…”
mentioning
confidence: 99%