&lt;title&gt;Plasma pretreatment and coating of PMMA Fresnel lenses&lt;/title&gt;

Schulz, Ulrike; Jaenchen, Heidrun; Kaiser, Norbert

doi:10.1117/12.360122

Cited by 6 publications

(3 citation statements)

References 6 publications

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“…As a consequence of high thermal stress, film cracking was seen to occur. 8 Alternatively an AR-hard-9 coating ͑47 nm Ta 2 O 5 only͒ was deposited. The maximum temperature on the substrate was raised to ϳ50°C, and no film cracking was observed.…”

Section: B Antireflective-hard-9 Upon Poly͑methyl Methacrylate͒mentioning

confidence: 99%

Antireflection coating design for plastic optics

2002

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The coating of plastics for optical applications is intended to improve the mechanical durability of soft polymers and to serve an antireflection function. Usually a classic four-layer antireflection system is added on top of a single-layer hard coating. With needle optimization, an alternative coating design has been developed. The design is characterized by thin high-refractive-index layers that are almost evenly distributed over the whole stack. Plasma ion-assisted deposition was used to deposit coatings upon poly(methyl methacrylate), polycarbonate, and cyclo-olefin copolymer. Uniform antireflection and high scratch resistance have been achieved.

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Section: B Antireflective-hard-9 Upon Poly͑methyl Methacrylate͒mentioning

confidence: 99%

Antireflection coating design for plastic optics

2002

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“…Different deposition methods based on wet chemistry, physical vapor deposition (PVD) and chemical vapor deposition (CVD) techniques, such as sol-gel method [4], ion and plasma assisted PVD processes [5] and plasma enhanced chemical vapor deposition (PECVD) [6] have been applied on PMMA and other plastic substrates with a motivation of enhancing their optical functionalities. Previous research suggests a special direct current (DC) glow discharge plasma pre-treatment [7,8], or a vacuum ultraviolet (VUV) protection layer by boat evaporation [9] prior to the plasma ion assisted depositions to improve the adhesion of thin films on PMMA. Several other approaches involving moth eye structures by full wafer and roll-to-roll nano-imprint lithography (NIL) [10], layer-by-layer assembly of hollow silica nanoparticles [11] and porous quarter wave antireflection coatings (ARC) with colloidal nanospheres [12] have also been demonstrated for ARC on plastics.…”

Section: Introductionmentioning

confidence: 99%

Antireflection Coating on PMMA Substrates by Atomic Layer Deposition

2020

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Antireflection coatings (ARC) are essential for various optical components including such made of plastics for high volume applications. However, precision coatings on plastics are rather challenging due to typically low adhesion of the coating to the substrate. In this work, optimization of the atomic layer deposition (ALD) processes towards conformal optical thin films of Al2O3, TiO2 and SiO2 on poly(methyl methacrylate) (PMMA) has been carried out and a five-layer ARC is demonstrated. While the uncoated PMMA substrates have a reflectance of nearly 8% in the visible (VIS) spectral range, this is reduced below 1.2% for the spectral range of 420–670 nm by applying a double-side ARC. The total average reflectance is 0.7%. The optimized ALD coatings show a good adhesion to the PMMA substrates even after the climate test. Microscopic analysis on the cross-hatch areas on PMMA after the climate test indicates very good environmental stability of the ALD coatings. These results enable a possible route by ALD to deposit uniform, crack free, adhesive and environmentally durable thin film layers on sensitive thermoplastics like PMMA.

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“…For the development of a new coating process typical performance properties such as thermal stability, variation of outgassing in a vacuum and possible decomposition during exposure to plasma and short wavelength radiation have to be taken into account for every single type of polymer substrate. Interactions between plasma and polymer surfaces are a widely investigated topic, and polymer reaction mechanisms are increasingly known for polyolefins [4,5],aromatic polyesters like polycarbonate (PC) [6,7] as well as polyacrylates represented by PMMA [8][9][10]. For polycarbonate materials detailed investigations about degradation caused by UV irradiation have also been carried out [1 1-13].…”

Section: Introductionmentioning

confidence: 99%

PVD coating for optical applications on temperature-resistant thermoplastics

2004

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The performance of the high temperature resistant polymers Pleximid®, APEC® and Ultrason® as substrate materials in plasma-assisted physical vapor deposition processes was studied and compared with well-known thermoplastics for optical applications. Different effects of UV irradiation and plasma exposure on the polymers' optical features, surface energy and adhesion properties for oxide layers, typically used for interference multilayer coatings, are shown

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<title>Plasma pretreatment and coating of PMMA Fresnel lenses</title>

Cited by 6 publications

References 6 publications

Antireflection coating design for plastic optics

Antireflection coating design for plastic optics

Antireflection Coating on PMMA Substrates by Atomic Layer Deposition

PVD coating for optical applications on temperature-resistant thermoplastics

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