&lt;title&gt;Practical aspects of micromachined gas distribution systems for semiconductor processing&lt;/title&gt;

Henning, Alex; Cozad, Brad A.; Lawrence, Elizabeth; Arkilic, Errol; Harris, James M.

doi:10.1117/12.395668

Cited by 2 publications

(1 citation statement)

References 4 publications

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“…Thermopneumatic actuators have been applied to a relatively wide variety of applications using microfabrication techniques [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Microvalves, micropumps, and integrated flow distribution and control systems (for either gases or liquids) have been researched, developed and deployed commercially.…”

Section: Introductionmentioning

confidence: 99%

On the reliability of thermopneumatic actuators with silicon membranes

Henning¹

2007

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

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The application of thermopneumatic actuators to microvalves and microfluidic processing systems continues to attract research and development interest. Yet, as with most microvalve and microfluidic work, little information has been reported with respect to the reliability of microfluidic and microflow systems. In this work, therefore, we extend our earlier discussions of factors affecting silicon membrane reliability, to encompass particular effects of thermopneumatic actuators on such membranes. Specifically, we report experiments demonstrating the effect of cavitation in thermopneumatic actuators on silicon membranes. These experiments show that the nature of cavitation, in a hermetic, thermopneumatic actuator cavity which includes a silicon membrane, is to initiate fast transient pressure pulses in the cavity. The membrane moves mechanically in response to these pressure pulses. If the magnitude of these pressure pulses causes the membrane stress to exceed the silicon yield strength, then fracture of the membrane can occur. The work concludes with a conceptual approach to the design of thermopneumatic actuators, to ensure this failure mode does not occur.

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Section: Introductionmentioning

confidence: 99%

On the reliability of thermopneumatic actuators with silicon membranes

Henning¹

2007

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

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Long-Term Drift Measurements in MEMS-Based Mass Flow Controllers

Lawrence

Henning

2003

SPIE Proceedings

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Micro-electromechanical systems (MEMS) components find increasing use in devices which measure and control gas flow, for medical and industrial use. Little or no information on the reliability of these devices has been published. This work reports the results of long-term performance studies of pressure-based mass flow controllers (MFCs) comprised of MEMS microvalves, pressure sensors, and critical flow orifices. Specifically, the details of long-term drift in the silicon pressure sensors (which comprise the flow sensor) are presented. Generally, pressure-based MFCs using MEMS components retain a flow accuracy of better than 1% of full scale over a 20:1 dynamic range, with response time under 0.5 sec, after more than three million operation cycles. The primary cause of inaccuracy within this dynamic range, and of inaccuracy larger than 1% of full scale beyond this range, is attributable to uncompensated zero-offset drift in the silicon pressure sensors, whose behavior is intrinsic to the flow sensor. Data is presented which details this characteristic, across many MFCs. Mechanical, thermal, fluidic, pneumatic and electronic mechanisms possibly responsible for the drift are also presented. Means to overcome this long-term drift phenomenon in silicon pressure sensors will complete the discussion.

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<title>Practical aspects of micromachined gas distribution systems for semiconductor processing</title>

Cited by 2 publications

References 4 publications

On the reliability of thermopneumatic actuators with silicon membranes

On the reliability of thermopneumatic actuators with silicon membranes

Long-Term Drift Measurements in MEMS-Based Mass Flow Controllers

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