&lt;title&gt;Scattering effects from residual optical fabrication errors&lt;/title&gt;

Harvey, James E.; Thompson, Anita Kotha

doi:10.1117/12.215588

Cited by 66 publications

(18 citation statements)

References 25 publications

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“…Optical fabrication errors must be specified (and measured) over the entire range of relevant spatial frequencies, including the "mid" spatial frequencies that span the gap between the traditional "figure" and "finish" errors [9]. The optical fabrication errors in each spatial frequency domain has a different effect upon the resulting image quality; i.e., the diffraction-limited point spread function (PSF) is degraded in a different manner as indicated in the lower portion of Fig.…”

Section: Metrology: Characterization Of Optical Surfacesmentioning

confidence: 99%

Integrating optical fabrication and metrology into the optical design process

Harvey¹

2015

Appl. Opt.

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The recent validation of a generalized linear systems formulation of surface scatter theory and an analysis of image degradation due to surface scatter in the presence of aberrations has provided credence to the development of a systems engineering analysis of image quality as degraded not only by diffraction effects and geometrical aberrations, but to scattering effects due to residual optical fabrication errors as well. This generalized surface scatter theory provides insight and understanding by characterizing surface scatter behavior with a surface transfer function closely related to the modulation transfer function of classical image formation theory. Incorporating the inherently band-limited relevant surface roughness into the surface scatter theory provides mathematical rigor into surface scatter analysis, and implementing a fast Fourier transform algorithm with logarithmically spaced data points facilitates the practical calculation of scatter behavior from surfaces with a large dynamic range of relevant spatial frequencies. These advances, combined with the continuing increase in computer speed, leave the optical design community in a position to routinely derive the optical fabrication tolerances necessary to satisfy specific image quality requirements during the design phase of a project; i.e., to integrate optical metrology and fabrication into the optical design process.

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Section: Metrology: Characterization Of Optical Surfacesmentioning

confidence: 99%

Integrating optical fabrication and metrology into the optical design process

Harvey¹

2015

Appl. Opt.

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“…It has only recently become common practice to also specify and measure the mid spatial frequency surface irregularities [24][25][26]. There is thus a growing understanding among optical metrology engineers and image analysts that it is imperative to specify optical fabrication tolerances over the entire range of relevant spatial frequencies [27][28].…”

Section: Surface Characteristics: How To Calculate the Band-limited "mentioning

confidence: 99%

Determining parametric TIS behavior from optical fabrication metrology data

et al. 2011

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Optical manufacturers often have to deal with a specification on the total integrated scatter (TIS) or "Haze" from a given mirror surface. It is frequently thought that TIS or BRDF measurements are required to assure compliance with these specifications. TIS is determined by the spatial frequency banded-limited "relevant" rms surface roughness, the wavelength of light and the angle of incidence. For short-wavelength (EUV/X-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we show that the TIS can be accurately predicted, even for moderately rough surfaces, directly from the surface metrology data. We present parametric plots of the TIS for optical surfaces with arbitrary roughness, surface correlation widths and incident angles. Surfaces with both Gaussian and ABC or K-correlation power spectral density (PSD) functions have been modeled. These parametric TIS predictions provide insight and understanding regarding optical fabrication tolerances necessary to satisfy specific optical performance requirements

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“…The size and periodicity of these tooling marks, dependent on the machine platform by which they were polished, can range from 1 -50mm periods. Figure 4 illustrates a power spectral density plot (PSD) drawn by Harvey and Kotha [2] where low, mid and high spatial frequency regions are indicated and correlated to the point spread function (PSF). Low spatial frequency errors are associated with conventional aberrations and blurred features.…”

Section: Definition and Causes Of Mid-spatial Frequency Errorsmentioning

confidence: 99%