1995
DOI: 10.1117/12.218430
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<title>Specification of optical components using the power spectral density function</title>

Abstract: This paper describes the use of Fourier techniques to characterize the wavefront of optical components, specifically, the use of the power spectral density, (PSD), function. The PSDs of several precision optical components will be shown. Many of the optical components of interest to us have square, rectangular or irregularly shaped apertures with major dimensions up-to 800 mm. The wavefronts of components with non-circular apertures cannot be analyzed with Zemicke polynomials since these functions are an ortho… Show more

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Cited by 60 publications
(19 citation statements)
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“…(9) and (10) universally satisfy all CCOS technologies, such as CCP, MRF and IBF, and also satisfy all shape TRFs, regardless whether it is rotationally symmetric.…”
Section: Universal Formulationmentioning
confidence: 97%
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“…(9) and (10) universally satisfy all CCOS technologies, such as CCP, MRF and IBF, and also satisfy all shape TRFs, regardless whether it is rotationally symmetric.…”
Section: Universal Formulationmentioning
confidence: 97%
“…(9) shows that the MRA of a CCOS process is determined by its TRF, and it just equals the normalized amplitude spectrum of the FT of its TRF. Eq.…”
Section: Universal Formulationmentioning
confidence: 99%
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“…Traditionally, simple statistical measurements such as Zernike polynomials, peak-to-valley wavefront error and root mean square (RMS) roughness are used to obtain an initial quantitative description of the surfaces [3][4][5][6]. These measurements are based on height information and, for certain types of surfaces, can serve as a good description of their roughness.…”
Section: Introductionmentioning
confidence: 99%
“…The researchers in the Lawrence Livermore National Laboratory (LLNL) found that the periodic structure induces the disturbance of amplitude or phase of laser beam through theoretical and experimental methods, which will destroy the performance of high power optical system [10,11]. In order to ensure the beam quality and output energy of NIF laser system, NIF proposed the requirements of optical components in the MSF errors, that PSD-1:A ≤ 1.01ν -1.55 , RMS ≤ 1.8 nm, PSD-2:A ≤ 1.01ν -1.55 , RMS ≤ 1.1 nm [10].…”
Section: Introductionmentioning
confidence: 99%