&lt;title&gt;Synthetic phase holograms written by laser lithography&lt;/title&gt;

Haselbeck, Stefan; Heissmeier, M.; Hofmann, Walter P.; Krackhardt, Ulrich; Manzke, Bernd; Savander, P; Schrader, Martin; Schwider, Johannes; Sperl, M.; Streibl, N.

doi:10.1117/12.138557

Cited by 1 publication

(2 citation statements)

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“…The photoresist volume does not change during the thermal reflow process based on mass conservation. From equations ( 5) and ( 6), the hexagonal photoresist thickness is numerically determined (t n ) using equation (7). This numerical method can find its accurate solution as enough finite elements are divided.…”

Section: Theoretical Modelsmentioning

confidence: 99%

“…The critical angle becomes smaller than that on the naked substrate after the thermal reflow process because of the base layer below the photoresist cylinders. This method can fabricate a lower numerical lens aperture in the photoresist compared with a microlens on a glass substrate [7]. A microlens fabrication process capable of producing high quality microlens using standard IC processing materials has been developed.…”

Section: Introductionmentioning

confidence: 99%

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Hexagonal microlens array modeling and fabrication using a thermal reflow process

Lin

Yang

Chao

2003

J. Micromech. Microeng.

113

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A mathematical model for designing and fabricating a hexagonal microlens array using a thermal reflow process was developed in this study. The experimental results proved that a hexagonal microlens array could be produced without a gap at each microlens periphery. A hexagonal microlens array with a higher fill factor was successfully produced. In this experiment, hexagonal photoresist columns were formed onto a silicon substrate made using a lithographic process. The hexagonal pattern was laid out in an ortho-triangle on a PET (polyethylene terephthalate)-based mask. Using precise temperature and time control during the thermal reflow process, a hexagonal microlens array with lateral honeycomb geometry was formed from the melted photoresist flowing outward simultaneously and uniformly. The surface tension effect transformed the photoresist column surface into a spherical profile. The error in the fabricated microlens characteristics was within ±3% between two theoretical models used to predict the photoresist column thickness and actual thickness. This model is feasible for fabricating various sized hexagonal microlens arrays.

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Section: Theoretical Modelsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%