LTCC Post Load Cell

Abstract

This paper presents the development of a force post compressive load cell, fabricated using Low Temperature Cofired Ceramics (LTCC) technology. It was implemented as an LTCC mechanical load cell structure with a z-axis thick film strain gage using two different approaches. Fabrication methods and materials are explored in this work and fabricated devices are presented. This paper will also present the results of initial electromechanical sensitivity to load force and temperature tests. Compressive force behavior is consistent, in a strain level up to 1.500 micro-strain.