Machine Learning Aided Optimization of P1 Laser Scribing Process on Indium Tin Oxide Substrates
Vijay C. Karade,
Saewoong Kim,
Inyoung Jeong
et al.
Abstract:Present study employes a picosecond laser (532 nm) for selective P1 laser scribing on the indium tin oxide (ITO) layer and subsequent fine‐tuning of P1 scribing conditions with machine learning (ML) techniques. Initially, the scribing is performed by varying different laser parameters and further evaluate them via an optical microscope and two probe resistivity measurements. The corresponding scribing width and sheet resistance data are used as input databases for ML analysis. The classification and regression… Show more
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