With the rapid development of processing technology, increasing processing efficiency is no longer the only goal but also the utilization of green and clean manufacturing procedures is required. In this context, the development of an efficient processing strategy for ceramic matrix composites (CMCs) is of great importance. Although SiCf/SiC composites are regarded as one of the most novel fiber-reinforced ceramic matrix composites, their processing is quite difficult. Along these lines, in this work, the orthogonal test of single-grain scratches was conducted under different lubrication modes. From the acquired results, it was demonstrated that compared with the dry type, the minimum quantity lubrication (vegetable oil) lubrication method exhibited the best effect, the scratch force was reduced by 48.3%, and the surface uplift height was reduced by 48.4%. The dominant mode of material removal of the SiCf/SiC composites was a brittle fracture, and the damage characteristics mainly included natural fiber fracture, matrix breakage, fiber pullout, and fiber exposure. In addition, the scratch depth and the scratch angle are the key factors affecting the processing quality. Increasing the processing ratio of 0Ā° and using MQL (vegetable oil) have yielded the best results.