1996
DOI: 10.1063/1.116729
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Macroporous silicon with a complete two-dimensional photonic band gap centered at 5 μm

Abstract: We have fabricated a two-dimensional photonic band structure based on macroporous silicon with a gap common to both polarizations and centered at 5 m. A triangular lattice of circular air rods with a lattice constant of 2.3 m was etched 75 m deep in an n-type silicon substrate by electrochemical pore formation in hydrofluoric acid. The porous layer was then micromechanically structured in such a way that 200 m thick free-standing bars of porous material were left over on the silicon substrate. These bars were … Show more

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Cited by 330 publications
(144 citation statements)
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“…Perhaps for this reason attention has been drawn towards 2D lattice structures. The successful fabrication of 2D crystals with near-IR band gaps has been recently reported [4,5]. …”
mentioning
confidence: 99%
“…Perhaps for this reason attention has been drawn towards 2D lattice structures. The successful fabrication of 2D crystals with near-IR band gaps has been recently reported [4,5]. …”
mentioning
confidence: 99%
“…The same applies to the`largea structures based on opal, macroporous silicon [26] or those made by the "bre-pulling technique [24], structures that can be examined by placing them in the path of a collimated broadband and source and measuring the transmission/re#ection as a function of wavelength. The characterisation of waveguide-based structures in the optical regime, however, is not as obvious and a variety of ingenious approaches have been developed.…”
Section: Diwerent Methods Of Characterising Photonic Crystalsmentioning
confidence: 99%
“…Due to the generally`macroscopica (1}50 m) feature size of the electrochemically etched holes, the material thus produced is termed macroporousa silicon, in contrast to its`microporousa relative (Section 4.3.1). Macroporous silicon with feature sizes in the sub-micron range has been demonstrated [27,45], although most PBG-related experimental work is aimed at mid-to far-IR wavelengths [25,26].…”
Section: Electrochemistrymentioning
confidence: 99%
“…Sketch of one-(1D), two-(2D) and three-dimensional (3D) photonic crystals (Joannopolous et al, 2008). Grüning et al, 1995].…”
Section: Introductionmentioning
confidence: 99%