Thermoelectric Higher Manganese Silicides, MnSi x , were synthesized by magnesioreduction followed by spark plasma sintering with different nominal compositions (x = 1.65, 1.74, 1.80) and various post-synthesis annealing durations (0 h, 48 h, 96 h and 336 h). The composite Nowotny Chimney-Ladder crystal structures of the resulting samples were investigated by synchrotron X-ray powder diffraction. The modulation vector component γ, generally considered corresponding to the stoichiometry (x) of 1 Page 1 of 25 ACS Paragon Plus Environment Chemistry of Materials the material, were accurately determined by Rietveld refinement using a (3+1)D superspace approach. Regardless of the initial nominal composition, all the samples have a similar γ ∼ 1.736 after 48 h annealing at 900 K. This result suggests that MnSi x , at the temperature of K, is better described as a defined compound with x close to 1.736, rather than intermediate solid-solution phases with 1.725 < x < 1.75 as predicted by the commonly accepted phase diagram. At the fixed nominal composition MnSi 1.74 , γ increases significantly from 1.7313(2) to 1.7411(1) after 336 h annealing, indicating that the thermal history influences the Si stoichiometry. The evolution of γ with time is concomitant with a power factor drop ( -19 %), attributed to a decrease of the charge carrier concentration. The drop of the power factor, partially compensated by a decrease of the thermal conductivity, results in a -12 % reduction of the maximum figure of merit ZT , after prolonged annealing under realistic application conditions.