2017
DOI: 10.1063/1.4978748
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Magnetic and microstructural properties of sputter deposited Cr-doped aluminum nitride thin films on silicon substrates

Abstract: In this paper, we report on the microstructural and magnetic properties of CrxAl1−xN thin films with Cr concentrations ranging up to x = (8.5 ± 0.5) at. %. The thin films are sputter deposited on silicon substrates and exhibit a wurtzite type microstructure verified by X-ray diffraction measurements. A vibrating sample magnetometer based measurement equipment is used to investigate magnetic properties of the Cr doped thin films in a temperature range of T = 10 K–300 K, revealing a paramagnetic behavior. With i… Show more

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Cited by 14 publications
(6 citation statements)
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“…A representative plot of temperature variation of the real part of AC susceptibility normalized with its maximum value at each frequency are plotted in figure 5 for AlN thin film deposited at 400 o C. The peak height decreases and peaks shift towards higher temperatures with increase in the frequency of excitation field. This shift in peak temperature per decade change in frequency is quantified in the phenomenological parameter Ψ defined as Δ / Δ 10 . The parameter Ψ decreases with increase in the inter-particle interaction strength [32,33].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…A representative plot of temperature variation of the real part of AC susceptibility normalized with its maximum value at each frequency are plotted in figure 5 for AlN thin film deposited at 400 o C. The peak height decreases and peaks shift towards higher temperatures with increase in the frequency of excitation field. This shift in peak temperature per decade change in frequency is quantified in the phenomenological parameter Ψ defined as Δ / Δ 10 . The parameter Ψ decreases with increase in the inter-particle interaction strength [32,33].…”
Section: Resultsmentioning
confidence: 99%
“…Aluminium nitride (AlN), an insulator having a wide direct band-gap ~ 6.1 eV, is a promising candidate in the field of dilute magnetic semiconductors (DMS) for spintronics applications [1][2][3][4][5][6][7][8]. Previously, doping of a few percent of magnetic transition metal (TM) atoms such as Cr, Mn, Fe, V and Ni has been utilized to produce AlN based DMSs [1,[9][10][11]. However, in the case of magnetic dopants, there is always an ambiguity about the origin of magnetic order in DMS.…”
Section: Introductionmentioning
confidence: 99%
“…Small magnetic moments can be caused by traces of magnetic impurities (Fe, Co and/or Ni) introduced into the sample during the sample handling or multilayer deposition. 71,72 For example, a small amount of Fe, Co or Ni is perhaps incorporated in the multilayer during ML deposition from the IBS sputter chamber walls and/or from the target holder and sample holder. In that case, it should have been expected that the ML with carbon spacer layers should also show a ferromagnetic contribution in the SQUID measurement.…”
Section: Extended Characterisation Of Spacer Layersmentioning
confidence: 99%
“…In order to improve the densification process of the AlN ceramics usually, alkaline earth oxides and/or rear‐earth oxides are added as sintering promoters, 17 and recently from metal–organic precursors 18 . A number of elements, such as Si, Mg, Cr, and Ni, have been proposed as a dopant to AlN in order to improve certain electronic properties for various applications 19–26 …”
Section: Introductionmentioning
confidence: 99%