We have studied surface morphology and magnetic properties of Fe/MgO(001) films deposited at an angle varying between 0 o and 60 o with respect to the surface normal and with azimuth along the Fe [010] or the Fe[110] direction. Due to shadowing, elongated grains appear on the film surface for deposition at sufficiently large angle. X-ray reflectivity reveals that, depending on the azimuthal direction, films become either rougher or smoother for oblique deposition. For deposition along Fe[010] the pronounced uniaxial magnetic anisotropy (UMA) results in the occurrence of "reversed" two-step and of three-step hysteresis loops. For deposition along Fe[110] the growth-induced UMA is much weaker, causing a small rotation of the easy axes.Magnetic anisotropy of epitaxial films and its relationship to surface morphology have attracted much attention in recent years [1]. Both film properties are intimately related to the molecular beam epitaxy (MBE) deposition process. Oblique incidence deposition results via a self-shadowing effect [2,3] in the formation of grains in the plane of the film that are elongated perpendicular to the incident flux direction and with aspect ratio increasing at larger deposition angle with respect to the surface normal [4]. Consequently, an in-plane uniaxial magnetic anisotropy (UMA) with easy axis perpendicular to the incident flux direction is induced during growth of the magnetic films [4,5,6]. UMA was found to play an important role in determining the magnetization reversal in thin films of cubic systems [7,8]. Depending on the strength and orientation of the UMA, hysteresis curves with one, two and three steps are observed in various films at different field orientation. The appearance of the steps can be explained in terms of nucleation and propagation of domain walls (DWs) [8,9]. Consequently, understanding the influence of oblique incidence growth is very important because of its ability to control both magnetic anisotropy and surface morphology [10,11,12].Although shadowing effects have been studied in many magnetic systems, including Fe on MgO(001) [13] and Co on Cu(001) [14], the plane of oblique incidence was always kept parallel to the in-plane cubic easy axes of the magnetic layers. Here, we report on the influence of oblique deposition on the surface morphology and magnetic properties of Fe/MgO(001) films for deposition azimuth both along the Fe Fig. 1(c)). The elongated grains are believed to result from a redistribution of the incident flux due long-range attractive forces [15,16]. During evaporation the incident Fe atoms arrive preferentially on top of already formed grains rather than behind these grains. This shadowing effect is also observed for film deposition at 60 o with azimuth along [110]. The Fe grains on the surface are rhombic in shape with typical length of 15 nm and typical width of 6 nm (see Fig. 1(d)). Based on the STM images we conclude that the self-shadowing effect can be neglected for a deposition angle below 30 o . Moreover, the self-shadowing effect is...