Single crystalline Fe 3−␦ O 4 ͑0 ഛ ␦ ഛ 0.33͒ films have been epitaxially grown on InAs ͑001͒ substrates by molecular beam epitaxy using O 2 as source of active oxygen. Under optimum growth conditions, in situ real time reflection high-energy electron diffraction patterns, along with ex situ atomic force microscopy, indicate that ͑001͒ Fe 3−␦ O 4 can be grown under step-flow-growth mode with a characteristic ͑ ͱ 2 ϫ ͱ 2͒R45 surface reconstruction. X-ray photoelectron spectroscopy demonstrates the possibility of obtaining iron oxides with compositions ranging from Fe 3 O 4 to ␥-Fe 2 O 3 . Measurements with a superconducting quantum interference device magnetometer at 300 K show good magnetic properties, suggesting that iron-based oxides may be promising for spintronic applications. © 2007 American Institute of Physics. ͓DOI: 10.1063/1.2713784͔ During the last decade, there has been a considerable increase of studies on hybrid structures combining both semiconductors and magnetic materials. These studies are motivated by possible applications in the nascent field of spintronics, since the electron spin degree of freedom in hybrid structures is believed to be a source of a rich array of new physical phenomena. Different approaches have been adopted for the selection of adequate spin injectors including ferromagnetic metals, 1,2 dilute magnetic semiconductors, 3 and Heusler alloys. 4 The use of magnetic semiconductors in this field presents the formidable task of increasing the Curie temperature. Ferromagnetic metal and Heusler alloys on the other hand suffer from structural and interfacial problems during their growth. Quite surprisingly, there are few reports on iron oxide based half metals, which exhibit a large polarization at the Fermi level making them very attractive for spin injection into semiconductors.Fe 3 O 4 or magnetite belongs to a large family of ironbased oxides commonly called ferrites. Our choice for this material as a possible efficient spin injector into semiconductors stems from its physical properties, which are attractive in many respects. ͑i͒ It has half metallic character with a large spin polarization at the Fermi level. 5,6 ͑ii͒ It possesses an electrical resistivity of the same order of magnitude as a semiconductor, making the conductivity mismatch problem less severe than in the case of metals. ͑iii͒ It has a Curie temperature of about 850 K, well above room temperature. This study will combine the use of magnetite with InAs substrates. InAs is used because of high room temperature electron mobility and, more importantly, because of its large and tunable spin-orbit coupling strength ͑small ratio between the Rashba and Dresselhauss terms͒, important for spin-based devices. 7 Although the growth of iron oxides on metallic and oxide based substrates is a very well documented subject, 8 there are only few reports on the growth of iron oxides on semiconducting substrates.The purpose of the present letter is to extend the only work available 9 on the growth of Fe 3 O 4 on InAs with special emp...