1968
DOI: 10.1063/1.1652595
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Magnetic Field Measurements in the Scanning Electron Microscope

Abstract: The scanning electron microscope has been used to obtain quantitative values for the fields and field gradients emerging from magnetic heads or tapes. The microscope is used to image a known reference detail adjacent to the field source and the fields are computed from the resultant pattern distortion. Gradients are obtained by measuring the resultant astigmatism of the scanning beam. Fields down to 10 Oe were measured from a tape recorded at 100 cycles/cm.

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Cited by 27 publications
(6 citation statements)
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“…(8)J dI+-dL......,2K(V.)R(V.) cosO""dO"". (9) Now a criterion of signal quality can be written as l6 difference signal q= sum of standard deviations of signals (10) FIG. 1.…”
Section: Signal Quality and Optimum Aperture As A Function Of Secondamentioning
confidence: 99%
“…(8)J dI+-dL......,2K(V.)R(V.) cosO""dO"". (9) Now a criterion of signal quality can be written as l6 difference signal q= sum of standard deviations of signals (10) FIG. 1.…”
Section: Signal Quality and Optimum Aperture As A Function Of Secondamentioning
confidence: 99%
“…In semiconductor foundries, there are many electrical high-power cables. These cables are the basis for extremely low-frequency magnetic fields (ELF < 300 Hz) that disturb apparatuses functioning by electronic beam operation [1,2]. Some of these tools include electron microscopes (e.g., scanning electron microscopy (SEM), which is not only used for nanomaterials characterization but also in the latest in-situ nanomaterials engineering technology), scanning transmission electron microscopy (STEM), and electron backscatter diffraction (EBSD) [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…This is very important since installation of any additional devices in microscope chamber is usually complicated, expensive or sometimes even impossible. However, there was previously published a method for magnetic field measurement in SEM (using astigmatic beam deformation) [5], it do not allows to measure a periodic magnetic field.…”
Section: Introductionmentioning
confidence: 99%