Magnetic field measurements in the scanning electron microscope

Thornley, R.; Hutchison, J. L.

doi:10.1109/tmag.1969.1066539

Cited by 21 publications

(6 citation statements)

References 4 publications

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“…As was noted above, the estimation of the field B = B (S) using only the first addend of the expression (6) made earlier (see, for example, in Thornley and Hutchison 1969) introduces a significant error in the measurement results and gives an underestimated value of B (x,,). The contribution from the additional term d B, which was not included earlier, increases with the s/x, ratio, i.e.…”

Section: Analysis Of the Sensitivity Of The Methods And The Measuremenmentioning

confidence: 97%

“…The equal intensity lines ( Fig. 3) may be ascribed the absolute values determined from the relation (Thornley and Hutchison 1969).…”

Section: The Principles and Modifications Of The Scanning Shadow Methmentioning

confidence: 94%

“…The method discussed above may be used to fix the microfield-induced displacements of about 10-'R, whereas all the earlier electron beam methods (see, for example, in Thornley and Hutchison 1969) permitted the displacements of about R to be recorded. As a result, the sensitivity of the method of magnetic field measurements using automated readout on the basis of the diagram shown in Fig.…”

Section: Analysis Of the Sensitivity Of The Methods And The Measuremenmentioning

confidence: 99%

“…The applications of the transmission electron microscope (Marton and Lachenbruch 1949, Lazzari and Wade 1971, Gusev et al 1970) and SEM ( Thornley and Hutchison 1969) are based on the inclusion of the distortion of the shadow image of a sensor grid by the measured magnetic field. Such an indirect method, however, gives rise to errors and limitations in the resolution due to a comparatively rough structure of the sensors, while the measurement procedure is timeconsuming.…”

Section: Introductionmentioning

confidence: 99%

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Scanning electron microscopy of two‐dimensional magnetic stray fields

Рау¹,

Spivak²

1980

Scanning

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Methods used in metrology of two‐dimensional magnetic microfields and based on direct interaction of the electron beam of scanning electron microscope (SEM) with the studied fields are described. An analytical expression for calculating the value of the field is presented. The errors and applicability of the methods have been estimated. The concepts discussed are illustrated by the experimental results of the measurements of some types of statistical and dynamic stray fields.

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Section: Analysis Of the Sensitivity Of The Methods And The Measuremenmentioning

confidence: 97%

“…The equal intensity lines ( Fig. 3) may be ascribed the absolute values determined from the relation (Thornley and Hutchison 1969).…”

Section: The Principles and Modifications Of The Scanning Shadow Methmentioning

confidence: 94%

Section: Analysis Of the Sensitivity Of The Methods And The Measuremenmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Scanning electron microscopy of two‐dimensional magnetic stray fields

Рау¹,

Spivak²

1980

Scanning

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“…In quantitative studies of the distribution of local magnetic and electric stray fields, it is preferable to use the electron probe transmission methods (Rau and Spivak 1980, Thornley and Hutchison 1969, Wells and Brunner 1983. The essence of the methods is that, when traversing a stray field, a focused scanning electron beam is affected by the field and deflected from the initial direction by the Lorentz forces, whereupon the value of the deflection is recorded by a sensor and then used to indicate the distribution field data.…”

Section: Introductionmentioning

confidence: 99%

SEM tomography: Solid‐state media and microfields

Рау

1988

Scanning

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Nondestructive visualization of the internal structure of an object is necessary, for instance, in microbiology, laboratory physical experiments, and microelectronics. Computerized reconstruction tomography (CT) can be used for this purpose. This article deals with SEM-based microtomography Examples are presented of restoring images formed with x-rays and light [cathodoluminescence (CL)]. The potentialities of the Lorentz tomography of two-dimensional stray magnetic fields are demonstrated.

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The early history and future of the SEM

Wells

Joy

2006

Surface & Interface Analysis

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The early history and development of the scanning electron microscope (SEM) up to the time of the first commercial SEMs has been described by Oatley.1 In the first instance, commercial SEMs were manufactured both in England 2 and in Japan.3 -5 The history of the SEM has also been described by many authors.6 -21 Improvements in the performance and in the ease of operation of commercial SEMs have been remarkable and are expected to continue. Knoll 22,24 achieved four important experimental results using the apparatus shown in Fig. 1: (i) He obtained the specimen of a current image from solid polycrystalline sample as shown in Fig. 2. (ii) This image shows orientationdependent contrasts between grains as would now appear to be caused by electron channeling contrast. (iii) He measured the secondary electron (SE) plus backscattered electron (BSE) coefficient as a function of incident beam energy E 0 from various materials and showed that there is a 'second crossover' value of ¾1.5 keV for E 0 when SE C BSE coefficient is unity. The charging of the specimen is then minimized and is also stable. (iv) He measured the potential to which a nonconducting particle is charged by the beam by an early version of quantitative voltage contrast. Figure 3 shows an electron scattering model for the generation of SE that was proposed by von Ardenne, 25 which shows initial beam-broadening; wide-angle scattering; diffusion; escape of BSE and the excitation of SE at every stage. He proposed two kinds of high-resolution SE images. The first (now called SE-I imaging following a detailed discussion by Peters 26 ) is with E 0 equal to several tens of kiloelectronvolts so that the penetration depth (a few micrometers) is many times greater than the SE escape depth

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Magnetic field measurements in the scanning electron microscope

Cited by 21 publications

References 4 publications

Scanning electron microscopy of two‐dimensional magnetic stray fields

Scanning electron microscopy of two‐dimensional magnetic stray fields

SEM tomography: Solid‐state media and microfields

The early history and future of the SEM

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