Magnetic properties and reliabilities of FeXN (X=Ti,Al,Hf,CoHf,CrHf) nanocrystalline thin film head materials

Kim, K.H.; Choi, Hyun-Woong; Kim, J.; Kim, S.R.; Kim, K.Y.; Plan, S.H.; Kim, H.J.

doi:10.1109/20.908550

Cited by 11 publications

(3 citation statements)

References 8 publications

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“…[6]. However, the Fe B N PN film was used as a core material of an inductor to ensure the perfor- mance.…”

Section: Resultsmentioning

confidence: 99%

A megahertz switching DC/DC converter using FeBN thin film inductor

Kim¹,

Kim

et al. 2002

IEEE Trans. Magn.

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A dual spiral sandwiched thin film inductor with a dimension of 5 mm 5 mm was fabricated by a LIGA-like micromachined process. FeBN magnetic films were used as a core material. The inductance and quality factor value of the inductor were measured approximately 1 H and 4 up to 5 MHz, respectively. Using the FeBN film inductor, a hybrid dc/dc converter (15 mm 12 mm 1.5 mm) was designed and fabricated. The circuit topology of the converter was a zero voltage switching clamp voltage (ZVS-CV) buck converter. An input of 3.6 V was bucked to 2.7 V at a switching frequency of 1.8 MHz. The maximum power was 1.5 W. The measured efficiency of the buck converter reached a maximum value of 80% and kept stable up to 300 mA of load currents at 1.8 MHz.Index Terms-DC/DC converter, magnetic core, permeability, thin film inductor.

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“…[6]. However, the Fe B N PN film was used as a core material of an inductor to ensure the perfor- mance.…”

Section: Resultsmentioning

confidence: 99%

A megahertz switching DC/DC converter using FeBN thin film inductor

Kim¹,

Kim

et al. 2002

IEEE Trans. Magn.

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“…, 순철에 합금원소(Hf, Zr, Ta)를 첨가하여 형성된 비정질구조를 결정화하여 미세결정구조를 갖는 고 기능성 연자성 소재 제작법 등이 보고되고 있다 [8][9][10][11] . 특히 Fe-M계(Hf, Zr) 비정질 자성박막은 고주파 분위기 하에서도 우수한 연자기 특성을 보유하고 있으나, 비정질구조를 초미세 결정구조로의 변환을 위한 추가적 열처리 공정이 필요하다는 단점을 가지 고 있다.…”

Section: 서 론unclassified

The Effect of Thicknesses on Magnetic Properties of Fe-Hf-N Soft Magnetic Thin Films

Choi¹,

Kang²

2011

Journal of the Korean institute of surface engineering

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The thickness dependence of magnetic properties was experimentally investigated in nanocrystalline FeHf-N thin films fabricated by a RF magnetron sputtering method. In order to investigate the thickness effect on their magnetic properties, the films are prepared with different thickness ranges from 90 nm to 330 nm. It was revealed that the coercivity of the thin film increased with film thickness. On the contrary, the saturation magnetization decreased with film thickness. On the basis of the SEM and TEM, an amorphous phase forms during initial growth stage and it changes to crystalline structure after heat treatment at 550 o C. Nanocrystalline Fe-Hf-N particles are also generated.

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“…FeXN (X = Ta, Hf, Ti, Al, etc.) films are considered to be promising materials for their excellent soft magnetic properties, high saturation magnetization, and better reliabilities than the FeN films [6][7][8][9][10][11]. However, the uniaxial anisotropy fields of these films are typically below 20 Oe in the as-deposited states and can be reduced in annealing at the * Corresponding author.…”

Section: Introductionmentioning

confidence: 99%