“…Gadolinium nitride films can convert to oxide when exposed to air at ambient temperature within a few tens of second [15]. Furthermore, oxygen contamination will largely inhibit the ferromagnetic properties of gadolinium nitride [16,17], therefore it is of utmost importance to grow films with high purity and to avoid post-growth oxidation. Gadolinium nitride has previously been deposited by MolecularBeam Epitaxy (MBE) [15,18], Physical Vapor Deposition (PVD) [19,20], Pulsed Laser Deposition (PLD) [10] and very recently, Chemical Vapor Deposition (CVD) [21,22].…”