Magnetic-spiker excitation of gas-discharge lasers

Taylor, R. S.; Leopold, K. E.

doi:10.1007/bf01082392

Cited by 24 publications

(12 citation statements)

References 60 publications

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“…Comprehensive double discharge pumping circuits based on spark switches or saturable inductors are used for efficient energy transfer to the discharge plasma 1,2 . In this circuits a high-voltage pre-pulse generator with low stored energy ignites volume discharge while a low-voltage storage deposits main part of pumping energy in the impedance matched mode.…”

Section: Introductionmentioning

confidence: 99%

Discharge lasers pumped by double-discharge generators based on inductive energy storage

Тарасенко

Панченко

2010

SPIE Proceedings

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Generators with inductive energy storage (GIES) are developed for laser application. Discharge and laser parameters in high-pressure gas mixtures are studied. It was shown that the IES generator produces high-voltage pre-pulse and sharp increase of discharge current which allows to form long-lived stable discharge in different gas mixtures. Improve of both pulse duration and output energy was achieved for XeCl-, XeF-and KrF excimer lasers. Maximal at that date radiation power, output energy and laser pulse duration of N 2 laser were obtained. Efficient operation on CO 2 molecules with high peak power was demonstrated. Ultimate efficiency of HF(DF) non-chain lasers was achieved.

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Section: Introductionmentioning

confidence: 99%

Discharge lasers pumped by double-discharge generators based on inductive energy storage

Тарасенко

Панченко

2010

SPIE Proceedings

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“…10,19 The PFN is built from ceramic capacitors a͒ Electronic mail: L.Feenstra@tn.utwente.nl ͑TDK UHV 6A͒ and it has a capacitance of 427.2 nF. The peaking capacitance consists of ten capacitors ͑MuRata DHS 461-Z-30͒ of 460 pF ͑at 0 V͒ each.…”

mentioning

confidence: 99%

“…This result is consistent with the operation of a long pulse XeCl laser, operated in the resonant overshoot mode. 19,22 The PFN voltage, used throughout the experiment, is V PFN ϭ5.3 kV. The prepulse is delivered by a minimarx generator, equal to the x-ray source driver.…”

mentioning

confidence: 99%

On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Feenstra

Bastiaens

Peters

et al. 1999

Applied Physics Letters

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Long laser pulses of up to 120 ns full width at half maximum have been achieved in a discharge pumped ArF laser, using x-ray preionization and prepulse-mainpulse excitation using a magnetic switch. For the realization of these long pulse lengths a fast current rise time in the first stage of the discharge is a crucial factor. The laser performance depends strongly on the discharge stability, and thus on the partial pressure of the fluorine in the laser gas mixture.

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“…Discharge instabilities grow rapidly due to the voltage mismatching and the current oscillation. The beam quality of these lasers is poor, as the required time to build up a beam with a low divergence is longer than the stability time of the discharge.An important step to increase the efficiency and pulse duration of excimer lasers has been the development of u Fax: +31 53 4891102, E-mail: l.c.casper@tnw.utwente.nl the prepulse-mainpulse excitation technique [5,6]. The prepulse, a very fast rising high-voltage pulse, is applied to the discharge electrodes within a few nanoseconds after preionization to initiate the discharge homogeneously.…”

mentioning

confidence: 99%

“…An important step to increase the efficiency and pulse duration of excimer lasers has been the development of u Fax: +31 53 4891102, E-mail: l.c.casper@tnw.utwente.nl the prepulse-mainpulse excitation technique [5,6]. The prepulse, a very fast rising high-voltage pulse, is applied to the discharge electrodes within a few nanoseconds after preionization to initiate the discharge homogeneously.…”

mentioning

confidence: 99%

Long-pulse KrCl laser with a high discharge quality

et al. 2007

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The discharge quality and optimum pump parameters of a long-pulse high-pressure gas discharge excited KrCl laser are investigated. A three-electrode prepulse-mainpulse excitation circuit is employed as pump source. The discharge volume contains a gas mixture of HCl/Kr/Ne operated at a total pressure of up to 5 bar. For a plane-plane resonator, the divergence of both output laser beams is measured. A low beam divergence of less than 1 mrad is measured as a result of the very high discharge homogeneity. A maximum laser pulse duration of 150 ns (FWHM) is achieved for a pump duration of 270 ns (FWHM) and a power density of 340 kW cm −3 . Pumping the discharge under optimum conditions employing a stable resonator results in a maximum specific energy of 0.45 J/l with a laser pulse duration of 117 ns and an efficiency of 0.63% based on the deposited energy. High-pressure gas-discharge pumped rare-gas halide excimer lasers are sources of very powerful ultraviolet (UV) radiation. The wavelength range covered and the high pulse energies have made excimer lasers an extensively used tool for applications in science, industry and also in medicine [1,2]. Gas discharge pumping opened the way to UV-lasers with pulse repetition rates up to several kHz with output powers up to the kW-level. However, excimer lasers pumped by a simple charge-transfer circuit [3,4] are restricted to low efficiencies and short pulse durations of only a few tens of nanoseconds. Voltage matching between the storage capacitance used to pump the laser and the discharge steady-state voltage is hardly achievable with such circuits. The discharge current tends to oscillate under these conditions. Discharge instabilities grow rapidly due to the voltage mismatching and the current oscillation. The beam quality of these lasers is poor, as the required time to build up a beam with a low divergence is longer than the stability time of the discharge.An important step to increase the efficiency and pulse duration of excimer lasers has been the development of u Fax: +31 53 4891102, E-mail: l.c.casper@tnw.utwente.nl the prepulse-mainpulse excitation technique [5,6]. The prepulse, a very fast rising high-voltage pulse, is applied to the discharge electrodes within a few nanoseconds after preionization to initiate the discharge homogeneously. A lowimpedance circuit generates the mainpulse in order to sustain the discharge and to pump the laser. The mainpulse voltage can be chosen independently from the prepulse voltage. Therefore, matching between the sustaining voltage and the steady-state voltage can be realized. As a result, this excitation technique leads to an optimization of the pump efficiency as the voltage matching is possible and current ringing can be avoided. The discharge stability improves considerably and leads to an extension of the laser pulse duration. In the case of XeCl lasers (308 nm), laser pulse durations of several hundreds of nanoseconds with efficiencies up to 5% have been realized [7,8] and raised strong interest in science and indu...

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Magnetic-spiker excitation of gas-discharge lasers

Cited by 24 publications

References 60 publications

Discharge lasers pumped by double-discharge generators based on inductive energy storage

Discharge lasers pumped by double-discharge generators based on inductive energy storage

On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Long-pulse KrCl laser with a high discharge quality

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