Magnetostriction of Sm–Fe and Sm–Fe–B thin films fabricated by RF magnetron sputtering

Lim, Sang Ho; Choi, Yoo Seong; Han, Soo-Boo; Kim, H.J.; Shima, T.; Fujimori, H.

doi:10.1016/s0304-8853(98)00220-0

Cited by 45 publications

(10 citation statements)

References 18 publications

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“…These advantages lead to the investigation and development of Sm-Fe based thin films with good magnetostrictive characteristics. In 1998, Kim et al conducted a systematic investigation on the magnetostrictive behavior of Sm-Fe and Sm-Fe-B thin films over a wide composition range from 14.1 to 71.7 at% Sm [102]. As displayed in Figure 10, good magnetostrictive characteristics has been found at low magnetic fields in both Sm-Fe and Sm-Fe-B thin films.…”

Section: Smfe and Smfebmentioning

confidence: 99%

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A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

Liang

Dong

Chen

et al. 2020

Sensors

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Since the revival of multiferroic laminates with giant magnetoelectric (ME) coefficients, a variety of multifunctional ME devices, such as sensor, inductor, filter, antenna etc. have been developed. Magnetoelastic materials, which couple the magnetization and strain together, have recently attracted ever-increasing attention due to their key roles in ME applications. This review starts with a brief introduction to the early research efforts in the field of multiferroic materials and moves to the recent work on magnetoelectric coupling and their applications based on both bulk and thin-film materials. This is followed by sections summarizing historical works and solving the challenges specific to the fabrication and characterization of magnetoelastic materials with large magnetostriction constants. After presenting the magnetostrictive thin films and their static and dynamic properties, we review micro-electromechanical systems (MEMS) and bulk devices utilizing ME effect. Finally, some open questions and future application directions where the community could head for magnetoelastic materials will be discussed.

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Section: Smfe and Smfebmentioning

confidence: 99%

“…The excellent magnetostrictive characters of Sm-Fe and Sm-Fe-B thin films made them good candidates for the applications in MEMS device. Reprinted with permission from [102]. Copyright [1998], North Holland (Elsevier).…”

Section: Smfe and Smfebmentioning

confidence: 99%

A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

Liang

Dong

Chen

et al. 2020

Sensors

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“…FeSm-FeTaN hard/soft multilayer films with well-defined uniaxial in-plane anisotropy have been recently characterized as a function of layer thickness and volume fractions [3]. Saturation magnetostrictions larger than 1000 ppm are usually found in FeSm films [4] while FeTaN are soft materials with very high moment that can be deposited in a magnetic field to induce an easy axis anisotropy. The magnitude of the anisotropy can be controlled through the nitrogen content [5].…”

Section: Introductionmentioning

confidence: 99%

Magnetic coupling in Fe/sub 60/Sm/sub 40/-Fe/sub 95/Ta/sub 5/N multilayers

Butera

Weston²,

Barnard³

2002

IEEE Trans. Magn.

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Three sets of exchange spring magnetic films and multilayers with different characteristics and well-defined uniaxial anisotropy have been studied by magnetization and ferromagnetic resonance (FMR) techniques. It was found that the exchange spring behavior is strongly influenced by the thickness of the individual layers. In FMR measurements, two or more modes can be observed. These modes are related only to the soft phase and the different resonance fields arise from the different anisotropy of the soft layers. It was also observed that the effective demagnetization field is larger in multilayers than in single films, suggesting the presence of an additional easy plane anisotropy.Index Terms-Exchange spring magnet, ferromagnetic resonance, magnetic thin films, materials for microactuators.

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“…In this study, Young s modulus and Poisson s ratio for Sm-Fe thin lms are applied to be 39 GPa and 0.4, respectively. 1,18) In this study, the magnetostrictive susceptibility is de ned as the average of the dλ/dH interval between 0 to 80 kA/m.…”

Section: Magnetostrictionmentioning

confidence: 99%

“…1) At the present time, the TbFe based alloys are used as devices for micro-machines, sensor systems and surface acoustic wave lters, whereas the Sm-Fe based alloys have a price advantage over the Tb-Fe alloys. [1][2][3][4] The magnetostrictive susceptibility is the important factor for evaluation of the sensitivity of magnetostrictive materials. 5) The devices which are installed the high magnetostrictive susceptibility material are low power consumption.…”

Section: Introductionmentioning

confidence: 99%

Effect of Bias Sputtering on Magnetostrictive Property of Sm-Fe Thin Film

Sakano

Matsumura

2017

Mater. Trans.

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The Sm-Fe thin lms were prepared by a DC magnetron sputtering system installed the Langmuir probe with various substrate bias voltage. In this work, internal stress of the Sm-Fe thin lms was investigated considering ion bombardment. The in uence of ion bombardment on internal stress in lms was estimated by the ion bombardment parameter (P i ). The P i increased with increasing negative substrate voltage. Internal stress of Sm-Fe thin lms showed a larger compressive stress with increasing amount of the P i . The magnetostrictive susceptibility of Sm-Fe thin lms was improved by increasing compressive stress. The magnetostrictive susceptibility of the Sm-Fe thin lm was dependent on the P i .

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Magnetostriction of Sm–Fe and Sm–Fe–B thin films fabricated by RF magnetron sputtering

Cited by 45 publications

References 18 publications

A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

Magnetic coupling in Fe/sub 60/Sm/sub 40/-Fe/sub 95/Ta/sub 5/N multilayers

Effect of Bias Sputtering on Magnetostrictive Property of Sm-Fe Thin Film

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