Magnetron Sputtering Preparation of Diamond-Like Carbon Film Adhesion Characteristics Research

Abstract

Using vacuum magnetron sputtering, preparation of diamond-like carbon film by middle transition layer of Ti, TiN and TiAlN, Ti/TiN/TiAlN in preparing multilayer structure of DLC carbon film on stainless steel substrates, research among different coating material of DLC carbon membrane structure, appearance, hardness, the influence of the interface bonding strength and wear resistance, the film contains some carbon chain structure sp3 hybridized carbon content in the highest and the excellent comprehensive mechanical properties of the material of the middle layer. Experimental studies find that Ti/TiN/TiAlN as transition layer DLC carbon film performance is good, obvious anti stripping adhesion properties, can reduce the diamond-like coating system caused by thermal expansion mismatch stress, using Ti/TiN/TiAlN transition layer of the interface bonding strength of the most outstanding in the middle.

Fabrication of large scale uniform copper-island thin film for ultrasensitive surface enhanced Raman scattering

“…The effects of sputtering time, argon flow rate and sputtering power were systematically studied [29][30][31][32]. Firstly, sputtering time affects both the thickness of the film and the temperature inside the chamber.…”