2006
DOI: 10.1116/1.2201052
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Manganese-induced long-range lattice disorder and vacancy formation in metal-organic chemical vapor deposition grown and ion-implanted Ga1−xMnxN

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Cited by 5 publications
(3 citation statements)
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“…In the (Ga,Mn)N sample, however, Mn forms a deep level in the band gap of GaN [18,19] and could not contribute to the large increase in the electron concentration. In the meantime, there is evidence that the V N increase with Mn ions doped into GaN [20,21]. Therefore, we can presume that the additional V N in the doped sample gives rise to an increase in the carrier concentration, which will be further confirmed in the following sessions.…”
Section: Resultssupporting
confidence: 52%
“…In the (Ga,Mn)N sample, however, Mn forms a deep level in the band gap of GaN [18,19] and could not contribute to the large increase in the electron concentration. In the meantime, there is evidence that the V N increase with Mn ions doped into GaN [20,21]. Therefore, we can presume that the additional V N in the doped sample gives rise to an increase in the carrier concentration, which will be further confirmed in the following sessions.…”
Section: Resultssupporting
confidence: 52%
“…Concerning the growth aspect, we witness a formidable effort devoted to the optimization of, e.g., epitaxial growth techniques and procedures like molecular beam epitaxy (MBE) and metalorganic vapour phase epitaxy (MOVPE). In this respect, the meticulous control of the deposition parameters is expected to lead to the exact assessment of critical physical factors like, e.g., the solubility limit of the magnetic ions into the semiconductor matrix [23], the incorporation of electrically active acceptors [69] and the determination of the limiting factors in the case of co-doping TM/RE-acceptors/donors [70]. In this perspective, the importance of a careful in situ and real-time control of the deposition steps via electron diffraction and optical techniques has been recently increasingly underlined [23,71,72].…”
Section: Growth Methodsmentioning
confidence: 99%
“…The slight excess of metal components in the growth process compared to the undoped GaN growth and the incorporation of Mn deep acceptor levels are believed to promote the formation of N vacancies likely to generate shallow donor complexes and thus to contribute to selfcompensation. It has been argued that these electronic defects may be detrimental to the expected ferromagnetic ordering [70,100]. Other authors report the precipitation of Mn 3 N 2 and Mn 6 N 2.58 for GaN epilayers grown on sapphire substrates by MOVPE followed by Mn + ion implantation and annealing, as assessed by XRD [101].…”
Section: Mn Dopingmentioning
confidence: 99%