2016
DOI: 10.1002/smll.201602601
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Manipulating Electrical and Fluidic Access in Integrated Nanopore‐Microfluidic Arrays Using Microvalves

Abstract: On-chip microvalves regulate electrical and fluidic access to an array of nanopores integrated within microfluidic networks. This configuration allows for on-chip sequestration of biomolecular samples in various flow channels and analysis by independent nanopores.

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Cited by 36 publications
(32 citation statements)
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“…Standard soft lithography methods were used to generate molds on silicon wafers, as described previously (Benavente‐Babace et al, ; Tahvildari et al, ). A negative photoresist SU‐8‐2050 (MicroChem) was deposited onto clean silicon wafers to a thickness of 80–100 μm for devices and 120 μm for microwells (a double‐layer mold).…”
Section: Methodsmentioning
confidence: 99%
“…Standard soft lithography methods were used to generate molds on silicon wafers, as described previously (Benavente‐Babace et al, ; Tahvildari et al, ). A negative photoresist SU‐8‐2050 (MicroChem) was deposited onto clean silicon wafers to a thickness of 80–100 μm for devices and 120 μm for microwells (a double‐layer mold).…”
Section: Methodsmentioning
confidence: 99%
“…The helium ion milling approach, although successful for sub‐5 nm nanopore arrays, is prohibitively expensive and unavailable to many laboratories . A low‐cost alternative to ssNP fabrication is controlled dielectric breakdown (CBD), which to fabricate nanopore arrays requires that each intended nanopore site be electrically isolated from the others, whether by an integrated microfluidic channel or by a microscale liquid contact …”
Section: Introductionmentioning
confidence: 99%
“…[ 63 ] Copyright 2015, The Royal Society of Chemistry; Reproduced with permission. [ 64 ] Copyright 2017, Wiley‐VCH. (d) Reproduced with permission.…”
Section: Fabricationmentioning
confidence: 99%
“…In order to extend the capability of CBD method to specialized but promising applications, numerous efforts have been made in locally controlled CBD fabrication, which includes local thinning of the membrane by focused helium ions or a laser beam, [ 59–61 ] restricted liquid contact area of the membrane, [ 62–64 ] or atomic scale contact by atomic force microscopy (AFM) probe. [ 65 ] In 2017, Carlsen et al.…”
Section: Fabricationmentioning
confidence: 99%