2019
DOI: 10.1364/oe.27.009782
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Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains

Abstract: Laser-induced periodic surface structures (LIPSS) provide an easy and costeffective means of fabricating gratings and have been widely studied in recent decades. To overcome the challenge of orientation controllability, we developed a feasible and efficient method for manipulating the orientation of LIPSS in real time. Specifically, we used orthogonally polarized and equal-energy femtosecond laser (50 fs, 800 nm) double-pulse trains with time delay about 1ps, total peak laser fluence about 1.0 J/cm 2 , laser r… Show more

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Cited by 35 publications
(11 citation statements)
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“…Furthermore, for the LIPSS formation in the case of surface scan processing, the orientation of LIPSS is also influenced by scanning direction and speed, and it would rotate by certain angles. Liu et al realized the manipulation of the LIPSS orientation on silicon via double femtosecond laser beams irradiation of orthogonal polarization in scanning processing [115]. In this case, the orientation of LIPSS is constantly perpendicular to the scanning direction, regardless of the applied scanning path.…”
Section: Lipssmentioning
confidence: 99%
“…Furthermore, for the LIPSS formation in the case of surface scan processing, the orientation of LIPSS is also influenced by scanning direction and speed, and it would rotate by certain angles. Liu et al realized the manipulation of the LIPSS orientation on silicon via double femtosecond laser beams irradiation of orthogonal polarization in scanning processing [115]. In this case, the orientation of LIPSS is constantly perpendicular to the scanning direction, regardless of the applied scanning path.…”
Section: Lipssmentioning
confidence: 99%
“…In the present, diffuser-loaded encapsulation is a promising method in enhancing the color quality of WLEDs because it can fulfill the requirements of cost-saving and simple fabrication. Adopting this concept, WLED packages with diffuser base that contains metal oxide diffuser materials (TiO2, ZrO2 and SiO2) have been developed [15][16][17][18]. In the research of Chen's group [15], ZrO2 grains whose particle size is 300 nm were integrated to the remote phosphor structure and resulted in the decrease of CCT deviation, from 1000 K to 420 K in the angles from −70° to 70°.…”
Section: Introductionmentioning
confidence: 99%
“…Adopting this concept, WLED packages with diffuser base that contains metal oxide diffuser materials (TiO2, ZrO2 and SiO2) have been developed [15][16][17][18]. In the research of Chen's group [15], ZrO2 grains whose particle size is 300 nm were integrated to the remote phosphor structure and resulted in the decrease of CCT deviation, from 1000 K to 420 K in the angles from −70° to 70°. TiO2 diffusers (320 nm) on the phosphor or encapsulation layer were used by Lee and his partners [18].…”
Section: Introductionmentioning
confidence: 99%
“…Taking advantage of the characteristics of ultrashort laser pulses, complex irradiation schemes, including tailored pulse shapes and pulse sequences, have been explored in order to modify the laser-matter interaction processes involved [46,47], with applications in fields such as the chemical analysis of materials [48][49][50], materials processing [51,52], and materials synthesis through PLD [53][54][55], among others. Pulse shaping techniques have been implemented in PLD experiments with the aim of controlling the characteristics of the deposits through the control of the ablation process and plasma expansion.…”
Section: Introductionmentioning
confidence: 99%