2018
DOI: 10.1007/s41871-018-0014-y
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Manufacturing and Characterization of a Carbon-Based Amorphous (a-CNX) Coating Material

Abstract: A thick 400-micron amorphous carbon nitride (a-CN X ) coating material was synthesized by means of plasma-enhanced chemical vapor deposition process. High-power impulse magnetron sputtering technique was used to sputter a pure graphite target plate in reactive argon (Ar), nitrogen (N 2 ) and acetylene (C 2 H 2 ) environment for depositing the composite coating. Structural and chemical/elemental composition of the a-CN X composite material was investigated by field emission scanning electron microscopy, energy-… Show more

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Cited by 5 publications
(7 citation statements)
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References 70 publications
(111 reference statements)
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“…In temperature measurement terms, the temperature difference of the coolant is likely to decrease because the EM fields are theoretically better coupled with the core of the plasma. For this research, the focus is to present an alternative method for in-process monitoring of the torch efficiency, typically for the plasma surface applications, e.g., plasma torch etching [ 24 ], surface treatment [ 25 ] and coating [ 26 , 27 ].…”
Section: Discussionmentioning
confidence: 99%
“…In temperature measurement terms, the temperature difference of the coolant is likely to decrease because the EM fields are theoretically better coupled with the core of the plasma. For this research, the focus is to present an alternative method for in-process monitoring of the torch efficiency, typically for the plasma surface applications, e.g., plasma torch etching [ 24 ], surface treatment [ 25 ] and coating [ 26 , 27 ].…”
Section: Discussionmentioning
confidence: 99%
“…7a and b. The detail characteristics of peak discharge current-voltage waveform of reactive-HiPIMS deposition of a-CNx coating material is described in [22] Form Fig. 8 it can be observed that at the beginning of the pulse in 'ignition phase' though the cathode voltage reaches to its peak value instantly (-750 V), the plasma ignition is delayed by 10 to 12 µs.…”
Section: Machining Test Setupmentioning
confidence: 96%
“…The substrate samples (shims and steel discs for material characterization) were mechanically and chemically cleaned. Details of this procedure is described in [22] Before starting the multilayer coating synthesis process, in-situ high pressure Ar gas plasma cleaning as well as low pressure HiPIMS metal ion plasma cleaning of the substrate were done. The multilayer coating was deposited at ambient temperature and no external heat was applied to the substrate.…”
Section: Coating Thickness Calculationmentioning
confidence: 99%
“…Due to high current-density (0.61 A/cm 2 ) and reduced plateau discharge (pulse frequency 170 Hz and pulse length 70 µs), the high ion flux density at the substrate position facilitates growth of the densely packed microstructure [34,35]. The structure can be characterized as amorphous since no structure such as particles, agglomerates, or porous clusters are observed from SEM micrographs [2]. No periodic nanostructure can be observed, which was clearly visible in [4,5].…”
Section: Cu:cucn X Coating Morphologymentioning
confidence: 99%
“…For high-precision machining, a vibration-dampening mechanism close to the source of the vibration, i.e., at the cutting zone, not only increases cutting tool life but can also improve productivity and increase quality [1]. Magnetron-sputtered carbon-nitride coating (CN x ) exhibiting high elasticity and adequate hardness can potentially be used for improving cutting tool dynamic stiffness [2] and for reducing the friction coefficient of higher load-capacity bearings [3]. Metal and metal-matrix carbon-nitride multilayered nanocomposite coating can improve milling tools' cutting stability limit [4] and suppress chatter in the turning process [5].…”
Section: Introductionmentioning
confidence: 99%