Manufacturing Assessment of an XeF[sub 2] In-Situ Clean Process for Mitigation of Species Cross Contamination

Dunn, James P.; Rolland, James; Lundquist, P. M.; Bishop, Steve

doi:10.1063/1.3033638

Cited by 2 publications

(1 citation statement)

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“…[9] Thomas et al [10] demonstrated an effective method using fluorine cleaning chemistry to eliminate accumulated residues inside the ion implanter. Dieter et al [11] enhanced the ion source lifespan from 168 hours to 208 hours, which is approximately a 24% improvement, by installing XeF2 in the SDS (Safe Delivery Source) gas string and running Xe + beams inside the ion source for 15 min every 12 h. James et al [12] evaluated a new XeF2 in-situ clean process as an effective means for reducing the risk of species cross-contamination. Ruipeng et al [13] employed pre-Ni silicide including selective removal of oxides to minimize Si and Ni losses, spike removal at the NiSi/Si interface, reduction of pipe defects, and elimination of queue-time dependency.…”

Section: Introductionmentioning

confidence: 99%

Comparison of experiments and simulation data through the installation of an internal heating tube in a bushing

Shin,

Ryu,

Hwang

et al. 2024

Preprint

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This study aims to enhance the ion implanter performance by developing an innovative heating tube integrated within the bushing to improve temperature control. Gases such as PH3, AsH3, BF3, and GeF4 are ionized applying a high voltage of up to 80 kV in ion implanters. An ion beam is extracted from an electrode. Residual gases tend to be deposited inside the bushing when a bushing is operated at relatively low temperatures. The leakage current flows through the bushing owing to the deposited residual gas layer. This results in arcing due to potential differences. To address this issue, our approach involves designing and implementing a heating tube within the bushing, accompanied by the injection of a heating liquid to raise the temperature. The proposed heating system aims to prevent gas deposition and enhance the efficiency of the deposition process. The effectiveness of this solution is evaluated through a combination of experiments and simulations using a computational fluid dynamics software. Experimental results agree well with those of the simulation. Through these integrated experimental and simulation studies, we anticipate a significant enhancement in deposition process efficiency. The findings contribute valuable insights into optimizing ion implanter performance and reducing the need for frequent bushing replacements.

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