Manufacturing process of copper microgrooves utilizing a novel optical fiber-based laser-induced etching technique

Oh, Kyoung-Hwan; Lim, Hyuntaeck; Im, Hyeon‐Gyun; Jeong, Sungho

doi:10.1007/s12541-009-0061-9

Cited by 6 publications

(3 citation statements)

References 15 publications

(13 reference statements)

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“…The laser beam is launched into a multimode optical fiber with a core diameter of 105 µm by using a 5× objective lens and directly delivered to the workpiece through the optical fiber. 13,14 Owing to the optical fiber as a low loss light waveguide, no optical elements are required in the laser beam path, resulting in a simple experimental setup. The one end of the optical fiber is stripped off to be used as a machining tool.…”

Section: Methodsmentioning

confidence: 99%

Application of etchant jet for laser micromachining of metal channels

Kim

et al. 2009

Int. J. Precis. Eng. Manuf.

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A laser micromachining technique that employs etchant jet for thermochemical wet etching of metallic channels is introduced. In this method, the etchant supplies chemicals for thermochemical reaction and laser beam delivered through an optical fiber provides the thermal energy. For the generation of etchant jet, a nozzle with a gap control function is utilized. By using this method, microchannels with a triangular cross-sectional profile and a depth ranging from 100 to 300 µm and a width ranging from 100 to 200 µm are fabricated on stainless steel 304. Since the etchant is supplied in the form of a liquid jet, it is expected that this technique can be applied for the fabrication of microchannels on industry scale workpiece. The variation of channel size and shape with respect to process parameters is examined. Also, the potential application to the fabrication of metallic microchannels with high-aspect-ratio is investigated.

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Section: Methodsmentioning

confidence: 99%

Application of etchant jet for laser micromachining of metal channels

Kim

et al. 2009

Int. J. Precis. Eng. Manuf.

Self Cite

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“…Machining processes that use microorganisms to remove metal from a workpiece, also known as biomachining, are considered more environmentally friendly than other means of removal. [2][3][4]15 Some advantages of using microorganisms include low energy consumption, high energy efficiency, and low cost. 5 Moreover, because metabolic microorganisms are utilized, no damaged layer or heat-affected zone is generated in the machined surface.…”

Section: Introductionmentioning

confidence: 99%

A study on copper micromachining using microorganisms

Istiyanto

Yoon

2010

Int. J. Precis. Eng. Manuf.

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“…In recent years, Suman [7] modelled surface tension gradient for grooved MHPs, analyzed the impacts of surface tension gradient on heat pipes' performances from the perspectives of working fluid's curvature radius, pressure and velocity, and concluded that heat transfer performances can be greatly enhanced by affixing appropriate surfactant or surface charge, which can decrease surface tension gradient of working fluid in heat pipes. Oh et al [8] proposed a technique of laser-induced thermochemical etching, which can help fabricate triangle grooves with smooth surface in copper pipes' inner wall. Xin et al…”

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confidence: 99%

Forming method of micro heat pipe with compound structure of sintered wick on grooved substrate

et al. 2015

Heat Mass Transfer

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in chips and dramatically reducing reliability and performances [1][2][3]. So thermal control has become a hot issue for the high-power electronic components with high heatflux, which urgently needs solving. Miniature/micro heat pipes have become ideal radiating devices for high heatflux chips because of their high heat conductivity and no need for extra electronic driving. As a heat pipe's heat transfer performance is mainly determined by its wick structure, and the compound structure of sintered wick on a grooved substrate can have both sintered pipes' greater capillary force and grooved pipes' lower back-flow resistance to working fluid, therefore can better suit the trend of being light, thin, short and miniature for high heat-flux electronic devices [4][5][6]. But the key problems are how to fabricate ideal micro grooves in the inner wall of thin circular copper pipes to reduce the back-flow resistance to working fluid, and how to sinter a thin layer of copper powders on these micro grooves to boost capillary force, and consequently MHPs' heat transfer performances.The higher requirement for thermal control in so many industries has attracted more scholars to research on MHPs. In recent years, Suman [7] modelled surface tension gradient for grooved MHPs, analyzed the impacts of surface tension gradient on heat pipes' performances from the perspectives of working fluid's curvature radius, pressure and velocity, and concluded that heat transfer performances can be greatly enhanced by affixing appropriate surfactant or surface charge, which can decrease surface tension gradient of working fluid in heat pipes. Oh et al. [8] proposed a technique of laser-induced thermochemical etching, which can help fabricate triangle grooves with smooth surface in copper pipes' inner wall. Xin et al.[9] fabricated loop heat pipe (LHP) wicks through cold pressing and loose powder sintering respectively, tested the porosity, permeability and pore radius of two types of wicks, and discovered that the Abstract Micro heat pipes (MHPs) with excellent heat transfer performance have been the ideal radiating components to meet increasingly higher requirements posed by high heat-flux products. Based on MHPs' working principle, this study deduced capillary limit of a novel MHP with compound structure of sintered wick on grooved substrate, and probed into its forming mechanism: first, highspeed oil-filled spinning was applied to fabricating micro grooves, with optimal spinning and drawing speeds determined; then a mini-type vibration machine was used to help fill copper powders fast and uniformly, with appropriate sintering temperature and time fixed; the manufacturing method that integrates vacuum-pumping-cold-welding with secondary-degassing-cold-welding to increase vacuumizing efficiency. The results of experiments on its heat transfer performance show that the MHPs with sinteredwick-on-grooved-substrate structure fabricated through the proposed forming method can not only acquire much better heat transfer performance, but have advantag...

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Manufacturing process of copper microgrooves utilizing a novel optical fiber-based laser-induced etching technique

Abstract: NOMENCLATURE P = laser power V = scan speed of the laser beam C= etchant concentration G = minimum gap between the workpiece and the fiber tip

Cited by 6 publications

References 15 publications

Application of etchant jet for laser micromachining of metal channels

Application of etchant jet for laser micromachining of metal channels

A study on copper micromachining using microorganisms

Forming method of micro heat pipe with compound structure of sintered wick on grooved substrate

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