Manufacturing Technology of Pressure Sensor’s Sensitive
Elements Based on “Sapphire – Viterious Dielectric –
Ceramic” Junction

Malyukov, Sergey; Mishnev, Victor

doi:10.18522//2311-3103-2023-2-111-119

IZVESTIYA SFedU. ENGINEERING SCIENCES

2023

DOI: 10.18522//2311-3103-2023-2-111-119

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Manufacturing Technology of Pressure Sensor’s Sensitive Elements Based on “Sapphire – Viterious Dielectric – Ceramic” Junction

Sergey Malyukov,

Victor Mishnev

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Manufacturing Technology of Pressure Sensor’s Sensitive Elements Based on “Sapphire – Viterious Dielectric – Ceramic” Junction

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